3/10/2010	8:12:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2010	8:12:19 AM	Recipe started at 8:12 AM
3/10/2010	8:12:19 AM	H2 valve closed
3/10/2010	8:12:19 AM	BCl3 valve closed
3/10/2010	8:12:19 AM	PH3 valve closed
3/10/2010	8:12:19 AM	SiCl4 pre valve closed
3/10/2010	8:12:19 AM	SiCl4 post valve closed
3/10/2010	8:12:19 AM	Main Vac valve closed
3/10/2010	8:12:19 AM	Bypass valve closed
3/10/2010	8:12:19 AM	Bubbler valve closed
3/10/2010	8:12:19 AM	Helium valve opened
3/10/2010	8:12:19 AM	Helium MFC set to  500.000000
3/10/2010	8:12:19 AM	H2 MFC set to  0.000000
3/10/2010	8:12:19 AM	BCl3 MFC set to  0.000000
3/10/2010	8:12:19 AM	SiCl4 MFC set to  0.000000
3/10/2010	8:12:19 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	8:12:19 AM	Tube furnace set to 0
3/10/2010	8:13:40 AM	Helium valve closed
3/10/2010	8:13:40 AM	H2 valve closed
3/10/2010	8:13:40 AM	BCl3 valve closed
3/10/2010	8:13:40 AM	PH3 valve closed
3/10/2010	8:13:40 AM	SiCl4 pre valve closed
3/10/2010	8:13:40 AM	SiCl4 post valve closed
3/10/2010	8:13:40 AM	Main Vac valve closed
3/10/2010	8:13:40 AM	Bypass valve closed
3/10/2010	8:13:40 AM	Bubbler valve closed
3/10/2010	8:13:40 AM	Helium MFC set to  0.000000
3/10/2010	8:13:40 AM	H2 MFC set to  0.000000
3/10/2010	8:13:40 AM	BCl3 MFC set to  0.000000
3/10/2010	8:13:40 AM	SiCl4 MFC set to  0.000000
3/10/2010	8:13:40 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	8:13:40 AM	Tube furnace set to 0
3/10/2010	8:13:40 AM	Run finished at 8:13 AM
3/10/2010	8:13:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2010	8:26:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	8:26:51 AM	Recipe started at 8:26 AM
3/10/2010	8:26:51 AM	Helium valve closed
3/10/2010	8:26:51 AM	H2 valve closed
3/10/2010	8:26:51 AM	BCl3 valve closed
3/10/2010	8:26:51 AM	PH3 valve closed
3/10/2010	8:26:51 AM	SiCl4 pre valve closed
3/10/2010	8:26:51 AM	SiCl4 post valve closed
3/10/2010	8:26:51 AM	Main Vac valve closed
3/10/2010	8:26:51 AM	Bubbler valve closed
3/10/2010	8:26:51 AM	Bypass valve opened
3/10/2010	8:26:51 AM	Helium MFC set to  0.000000
3/10/2010	8:26:51 AM	H2 MFC set to  0.000000
3/10/2010	8:26:51 AM	BCl3 MFC set to  0.000000
3/10/2010	8:26:51 AM	SiCl4 MFC set to  0.000000
3/10/2010	8:26:51 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	8:26:51 AM	Tube furnace set to 0
3/10/2010	8:27:21 AM	Helium valve closed
3/10/2010	8:27:21 AM	H2 valve closed
3/10/2010	8:27:21 AM	BCl3 valve closed
3/10/2010	8:27:21 AM	PH3 valve closed
3/10/2010	8:27:21 AM	SiCl4 pre valve closed
3/10/2010	8:27:21 AM	SiCl4 post valve closed
3/10/2010	8:27:21 AM	Bubbler valve closed
3/10/2010	8:27:21 AM	Main Vac valve opened
3/10/2010	8:27:21 AM	Bypass valve opened
3/10/2010	8:27:21 AM	Helium MFC set to  0.000000
3/10/2010	8:27:21 AM	H2 MFC set to  0.000000
3/10/2010	8:27:21 AM	BCl3 MFC set to  0.000000
3/10/2010	8:27:21 AM	SiCl4 MFC set to  0.000000
3/10/2010	8:27:21 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	8:27:21 AM	Tube furnace set to 0
3/10/2010	8:27:22 AM	Run finished at 8:27 AM
3/10/2010	8:27:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	8:29:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2010	8:29:40 AM	Recipe started at 8:29 AM
3/10/2010	8:29:40 AM	H2 valve closed
3/10/2010	8:29:40 AM	BCl3 valve closed
3/10/2010	8:29:40 AM	PH3 valve closed
3/10/2010	8:29:40 AM	SiCl4 pre valve closed
3/10/2010	8:29:40 AM	SiCl4 post valve closed
3/10/2010	8:29:40 AM	Main Vac valve closed
3/10/2010	8:29:40 AM	Bypass valve closed
3/10/2010	8:29:40 AM	Bubbler valve closed
3/10/2010	8:29:40 AM	Helium valve opened
3/10/2010	8:29:40 AM	Helium MFC set to  500.000000
3/10/2010	8:29:40 AM	H2 MFC set to  0.000000
3/10/2010	8:29:40 AM	BCl3 MFC set to  0.000000
3/10/2010	8:29:40 AM	SiCl4 MFC set to  0.000000
3/10/2010	8:29:40 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	8:29:40 AM	Tube furnace set to 0
3/10/2010	8:31:01 AM	Helium valve closed
3/10/2010	8:31:01 AM	H2 valve closed
3/10/2010	8:31:01 AM	BCl3 valve closed
3/10/2010	8:31:01 AM	PH3 valve closed
3/10/2010	8:31:01 AM	SiCl4 pre valve closed
3/10/2010	8:31:01 AM	SiCl4 post valve closed
3/10/2010	8:31:01 AM	Main Vac valve closed
3/10/2010	8:31:01 AM	Bypass valve closed
3/10/2010	8:31:01 AM	Bubbler valve closed
3/10/2010	8:31:01 AM	Helium MFC set to  0.000000
3/10/2010	8:31:01 AM	H2 MFC set to  0.000000
3/10/2010	8:31:01 AM	BCl3 MFC set to  0.000000
3/10/2010	8:31:01 AM	SiCl4 MFC set to  0.000000
3/10/2010	8:31:01 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	8:31:01 AM	Tube furnace set to 0
3/10/2010	8:31:01 AM	Run finished at 8:31 AM
3/10/2010	8:31:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2010	8:31:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	8:31:15 AM	Recipe started at 8:31 AM
3/10/2010	8:31:15 AM	Helium valve closed
3/10/2010	8:31:15 AM	H2 valve closed
3/10/2010	8:31:15 AM	BCl3 valve closed
3/10/2010	8:31:15 AM	PH3 valve closed
3/10/2010	8:31:15 AM	SiCl4 pre valve closed
3/10/2010	8:31:15 AM	SiCl4 post valve closed
3/10/2010	8:31:15 AM	Main Vac valve closed
3/10/2010	8:31:15 AM	Bubbler valve closed
3/10/2010	8:31:15 AM	Bypass valve opened
3/10/2010	8:31:15 AM	Helium MFC set to  0.000000
3/10/2010	8:31:15 AM	H2 MFC set to  0.000000
3/10/2010	8:31:15 AM	BCl3 MFC set to  0.000000
3/10/2010	8:31:15 AM	SiCl4 MFC set to  0.000000
3/10/2010	8:31:15 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	8:31:15 AM	Tube furnace set to 0
3/10/2010	8:31:37 AM	Helium valve closed
3/10/2010	8:31:37 AM	H2 valve closed
3/10/2010	8:31:37 AM	BCl3 valve closed
3/10/2010	8:31:37 AM	PH3 valve closed
3/10/2010	8:31:37 AM	SiCl4 pre valve closed
3/10/2010	8:31:37 AM	SiCl4 post valve closed
3/10/2010	8:31:37 AM	Bubbler valve closed
3/10/2010	8:31:37 AM	Main Vac valve opened
3/10/2010	8:31:37 AM	Bypass valve opened
3/10/2010	8:31:37 AM	Helium MFC set to  0.000000
3/10/2010	8:31:37 AM	H2 MFC set to  0.000000
3/10/2010	8:31:37 AM	BCl3 MFC set to  0.000000
3/10/2010	8:31:37 AM	SiCl4 MFC set to  0.000000
3/10/2010	8:31:37 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	8:31:37 AM	Tube furnace set to 0
3/10/2010	8:31:37 AM	Run finished at 8:31 AM
3/10/2010	8:31:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	8:37:14 AM	Main Vac valve closed
3/10/2010	8:37:14 AM	Bypass valve closed
3/10/2010	8:37:45 AM	Bypass valve opened
3/10/2010	8:37:45 AM	Main Vac valve opened
3/10/2010	8:40:57 AM	Recipe started at 8:40 AM
3/10/2010	8:40:57 AM	Helium valve closed
3/10/2010	8:40:57 AM	BCl3 valve closed
3/10/2010	8:40:57 AM	PH3 valve closed
3/10/2010	8:40:57 AM	SiCl4 pre valve closed
3/10/2010	8:40:57 AM	SiCl4 post valve closed
3/10/2010	8:40:57 AM	Main Vac valve closed
3/10/2010	8:40:57 AM	Bypass valve closed
3/10/2010	8:40:57 AM	Bubbler valve closed
3/10/2010	8:40:57 AM	H2 valve opened
3/10/2010	8:40:57 AM	Helium MFC set to  0.000000
3/10/2010	8:40:57 AM	H2 MFC set to  500.000000
3/10/2010	8:40:57 AM	BCl3 MFC set to  0.000000
3/10/2010	8:40:57 AM	SiCl4 MFC set to  0.000000
3/10/2010	8:40:57 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	8:40:57 AM	Tube furnace set to 0
3/10/2010	8:42:20 AM	Helium valve closed
3/10/2010	8:42:20 AM	BCl3 valve closed
3/10/2010	8:42:20 AM	PH3 valve closed
3/10/2010	8:42:20 AM	SiCl4 pre valve closed
3/10/2010	8:42:20 AM	SiCl4 post valve closed
3/10/2010	8:42:20 AM	Main Vac valve closed
3/10/2010	8:42:20 AM	Bypass valve closed
3/10/2010	8:42:20 AM	H2 valve opened
3/10/2010	8:42:20 AM	Bubbler valve opened
3/10/2010	8:42:20 AM	Helium MFC set to  0.000000
3/10/2010	8:42:20 AM	H2 MFC set to  500.000000
3/10/2010	8:42:20 AM	BCl3 MFC set to  0.000000
3/10/2010	8:42:20 AM	SiCl4 MFC set to  0.000000
3/10/2010	8:42:20 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	8:42:20 AM	Tube furnace set to 0
3/10/2010	9:02:21 AM	Helium valve closed
3/10/2010	9:02:21 AM	PH3 valve closed
3/10/2010	9:02:21 AM	Main Vac valve closed
3/10/2010	9:02:21 AM	Bypass valve closed
3/10/2010	9:02:21 AM	H2 valve opened
3/10/2010	9:02:21 AM	BCl3 valve opened
3/10/2010	9:02:21 AM	SiCl4 pre valve opened
3/10/2010	9:02:21 AM	SiCl4 post valve opened
3/10/2010	9:02:21 AM	Bubbler valve opened
3/10/2010	9:02:21 AM	Helium MFC set to  0.000000
3/10/2010	9:02:21 AM	H2 MFC set to  500.000000
3/10/2010	9:02:21 AM	BCl3 MFC set to  35.000000
3/10/2010	9:02:21 AM	SiCl4 MFC set to  325.000000
3/10/2010	9:02:21 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	9:02:21 AM	Tube furnace set to 0
3/10/2010	9:22:21 AM	Helium valve closed
3/10/2010	9:22:21 AM	BCl3 valve closed
3/10/2010	9:22:21 AM	PH3 valve closed
3/10/2010	9:22:21 AM	SiCl4 pre valve closed
3/10/2010	9:22:21 AM	SiCl4 post valve closed
3/10/2010	9:22:21 AM	Main Vac valve closed
3/10/2010	9:22:21 AM	Bypass valve closed
3/10/2010	9:22:21 AM	H2 valve opened
3/10/2010	9:22:21 AM	Bubbler valve opened
3/10/2010	9:22:21 AM	Helium MFC set to  0.000000
3/10/2010	9:22:21 AM	H2 MFC set to  500.000000
3/10/2010	9:22:21 AM	BCl3 MFC set to  0.000000
3/10/2010	9:22:21 AM	SiCl4 MFC set to  0.000000
3/10/2010	9:22:21 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	9:22:21 AM	Tube furnace set to 0
3/10/2010	9:42:21 AM	H2 valve closed
3/10/2010	9:42:21 AM	BCl3 valve closed
3/10/2010	9:42:21 AM	PH3 valve closed
3/10/2010	9:42:21 AM	SiCl4 pre valve closed
3/10/2010	9:42:21 AM	SiCl4 post valve closed
3/10/2010	9:42:21 AM	Main Vac valve closed
3/10/2010	9:42:21 AM	Bypass valve closed
3/10/2010	9:42:21 AM	Helium valve opened
3/10/2010	9:42:21 AM	Bubbler valve opened
3/10/2010	9:42:21 AM	Helium MFC set to  500.000000
3/10/2010	9:42:21 AM	H2 MFC set to  0.000000
3/10/2010	9:42:21 AM	BCl3 MFC set to  0.000000
3/10/2010	9:42:21 AM	SiCl4 MFC set to  0.000000
3/10/2010	9:42:21 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	9:42:21 AM	Tube furnace set to 0
3/10/2010	9:57:33 AM	Run aborted at 9:57 AM
3/10/2010	9:57:33 AM	Helium valve closed
3/10/2010	9:57:33 AM	H2 valve closed
3/10/2010	9:57:33 AM	BCl3 valve closed
3/10/2010	9:57:33 AM	PH3 valve closed
3/10/2010	9:57:33 AM	SiCl4 pre valve closed
3/10/2010	9:57:33 AM	SiCl4 post valve closed
3/10/2010	9:57:33 AM	Bypass valve closed
3/10/2010	9:57:33 AM	Main Vac valve closed
3/10/2010	9:57:33 AM	Bubbler valve closed
3/10/2010	9:57:33 AM	Helium MFC set to  0.000000
3/10/2010	9:57:33 AM	H2 MFC set to  0.000000
3/10/2010	9:57:33 AM	BCl3 MFC set to  0.000000
3/10/2010	9:57:33 AM	SiCl4 MFC set to  0.000000
3/10/2010	9:57:33 AM	Tube furnace set to 0
3/10/2010	9:57:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2010	9:57:47 AM	Recipe started at 9:57 AM
3/10/2010	9:57:47 AM	H2 valve closed
3/10/2010	9:57:47 AM	BCl3 valve closed
3/10/2010	9:57:47 AM	PH3 valve closed
3/10/2010	9:57:47 AM	SiCl4 pre valve closed
3/10/2010	9:57:47 AM	SiCl4 post valve closed
3/10/2010	9:57:47 AM	Main Vac valve closed
3/10/2010	9:57:47 AM	Bypass valve closed
3/10/2010	9:57:47 AM	Bubbler valve closed
3/10/2010	9:57:47 AM	Helium valve opened
3/10/2010	9:57:47 AM	Helium MFC set to  500.000000
3/10/2010	9:57:47 AM	H2 MFC set to  0.000000
3/10/2010	9:57:47 AM	BCl3 MFC set to  0.000000
3/10/2010	9:57:47 AM	SiCl4 MFC set to  0.000000
3/10/2010	9:57:47 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	9:57:47 AM	Tube furnace set to 0
3/10/2010	9:57:48 AM	Helium valve closed
3/10/2010	9:57:48 AM	H2 valve closed
3/10/2010	9:57:48 AM	BCl3 valve closed
3/10/2010	9:57:48 AM	PH3 valve closed
3/10/2010	9:57:48 AM	SiCl4 pre valve closed
3/10/2010	9:57:48 AM	SiCl4 post valve closed
3/10/2010	9:57:48 AM	Main Vac valve closed
3/10/2010	9:57:48 AM	Bypass valve closed
3/10/2010	9:57:48 AM	Bubbler valve closed
3/10/2010	9:57:48 AM	Helium MFC set to  0.000000
3/10/2010	9:57:48 AM	H2 MFC set to  0.000000
3/10/2010	9:57:48 AM	BCl3 MFC set to  0.000000
3/10/2010	9:57:48 AM	SiCl4 MFC set to  0.000000
3/10/2010	9:57:48 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	9:57:48 AM	Tube furnace set to 0
3/10/2010	9:57:48 AM	Run finished at 9:57 AM
3/10/2010	9:57:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2010	10:15:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	10:15:32 AM	Recipe started at 10:15 AM
3/10/2010	10:15:32 AM	Helium valve closed
3/10/2010	10:15:32 AM	H2 valve closed
3/10/2010	10:15:32 AM	BCl3 valve closed
3/10/2010	10:15:32 AM	PH3 valve closed
3/10/2010	10:15:32 AM	SiCl4 pre valve closed
3/10/2010	10:15:32 AM	SiCl4 post valve closed
3/10/2010	10:15:32 AM	Main Vac valve closed
3/10/2010	10:15:32 AM	Bubbler valve closed
3/10/2010	10:15:32 AM	Bypass valve opened
3/10/2010	10:15:32 AM	Helium MFC set to  0.000000
3/10/2010	10:15:32 AM	H2 MFC set to  0.000000
3/10/2010	10:15:32 AM	BCl3 MFC set to  0.000000
3/10/2010	10:15:32 AM	SiCl4 MFC set to  0.000000
3/10/2010	10:15:32 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:15:32 AM	Tube furnace set to 0
3/10/2010	10:16:04 AM	Helium valve closed
3/10/2010	10:16:04 AM	H2 valve closed
3/10/2010	10:16:04 AM	BCl3 valve closed
3/10/2010	10:16:04 AM	PH3 valve closed
3/10/2010	10:16:04 AM	SiCl4 pre valve closed
3/10/2010	10:16:04 AM	SiCl4 post valve closed
3/10/2010	10:16:04 AM	Bubbler valve closed
3/10/2010	10:16:04 AM	Main Vac valve opened
3/10/2010	10:16:04 AM	Bypass valve opened
3/10/2010	10:16:04 AM	Helium MFC set to  0.000000
3/10/2010	10:16:04 AM	H2 MFC set to  0.000000
3/10/2010	10:16:04 AM	BCl3 MFC set to  0.000000
3/10/2010	10:16:04 AM	SiCl4 MFC set to  0.000000
3/10/2010	10:16:04 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:16:04 AM	Tube furnace set to 0
3/10/2010	10:16:04 AM	Run finished at 10:16 AM
3/10/2010	10:16:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	10:20:31 AM	Main Vac valve closed
3/10/2010	10:20:32 AM	Bypass valve closed
3/10/2010	10:20:45 AM	Main Vac valve opened
3/10/2010	10:20:46 AM	Bypass valve opened
3/10/2010	10:21:46 AM	Recipe started at 10:21 AM
3/10/2010	10:21:46 AM	Helium valve closed
3/10/2010	10:21:46 AM	BCl3 valve closed
3/10/2010	10:21:46 AM	PH3 valve closed
3/10/2010	10:21:46 AM	SiCl4 pre valve closed
3/10/2010	10:21:46 AM	SiCl4 post valve closed
3/10/2010	10:21:46 AM	Main Vac valve closed
3/10/2010	10:21:46 AM	Bypass valve closed
3/10/2010	10:21:46 AM	H2 valve opened
3/10/2010	10:21:46 AM	Bubbler valve opened
3/10/2010	10:21:46 AM	Helium MFC set to  0.000000
3/10/2010	10:21:46 AM	H2 MFC set to  500.000000
3/10/2010	10:21:46 AM	BCl3 MFC set to  0.000000
3/10/2010	10:21:46 AM	SiCl4 MFC set to  0.000000
3/10/2010	10:21:46 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:21:46 AM	Tube furnace set to 0
3/10/2010	10:23:07 AM	Helium valve closed
3/10/2010	10:23:07 AM	BCl3 valve closed
3/10/2010	10:23:07 AM	PH3 valve closed
3/10/2010	10:23:07 AM	SiCl4 pre valve closed
3/10/2010	10:23:07 AM	SiCl4 post valve closed
3/10/2010	10:23:07 AM	Main Vac valve closed
3/10/2010	10:23:07 AM	Bypass valve closed
3/10/2010	10:23:07 AM	H2 valve opened
3/10/2010	10:23:07 AM	Bubbler valve opened
3/10/2010	10:23:07 AM	Helium MFC set to  0.000000
3/10/2010	10:23:07 AM	H2 MFC set to  500.000000
3/10/2010	10:23:07 AM	BCl3 MFC set to  0.000000
3/10/2010	10:23:07 AM	SiCl4 MFC set to  0.000000
3/10/2010	10:23:07 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:23:07 AM	Tube furnace set to 0
3/10/2010	10:43:08 AM	Helium valve closed
3/10/2010	10:43:08 AM	PH3 valve closed
3/10/2010	10:43:08 AM	Main Vac valve closed
3/10/2010	10:43:08 AM	Bypass valve closed
3/10/2010	10:43:08 AM	H2 valve opened
3/10/2010	10:43:08 AM	BCl3 valve opened
3/10/2010	10:43:08 AM	SiCl4 pre valve opened
3/10/2010	10:43:08 AM	SiCl4 post valve opened
3/10/2010	10:43:08 AM	Bubbler valve opened
3/10/2010	10:43:08 AM	Helium MFC set to  0.000000
3/10/2010	10:43:08 AM	H2 MFC set to  500.000000
3/10/2010	10:43:08 AM	BCl3 MFC set to  35.000000
3/10/2010	10:43:08 AM	SiCl4 MFC set to  325.000000
3/10/2010	10:43:08 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:43:08 AM	Tube furnace set to 0
3/10/2010	10:48:08 AM	Helium valve closed
3/10/2010	10:48:08 AM	BCl3 valve closed
3/10/2010	10:48:08 AM	PH3 valve closed
3/10/2010	10:48:08 AM	SiCl4 pre valve closed
3/10/2010	10:48:08 AM	SiCl4 post valve closed
3/10/2010	10:48:08 AM	Main Vac valve closed
3/10/2010	10:48:08 AM	Bypass valve closed
3/10/2010	10:48:08 AM	H2 valve opened
3/10/2010	10:48:08 AM	Bubbler valve opened
3/10/2010	10:48:08 AM	Helium MFC set to  0.000000
3/10/2010	10:48:08 AM	H2 MFC set to  500.000000
3/10/2010	10:48:08 AM	BCl3 MFC set to  0.000000
3/10/2010	10:48:08 AM	SiCl4 MFC set to  0.000000
3/10/2010	10:48:08 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:48:08 AM	Tube furnace set to 0
3/10/2010	11:08:08 AM	H2 valve closed
3/10/2010	11:08:08 AM	BCl3 valve closed
3/10/2010	11:08:08 AM	PH3 valve closed
3/10/2010	11:08:08 AM	SiCl4 pre valve closed
3/10/2010	11:08:08 AM	SiCl4 post valve closed
3/10/2010	11:08:08 AM	Main Vac valve closed
3/10/2010	11:08:08 AM	Bypass valve closed
3/10/2010	11:08:08 AM	Helium valve opened
3/10/2010	11:08:08 AM	Bubbler valve opened
3/10/2010	11:08:08 AM	Helium MFC set to  500.000000
3/10/2010	11:08:08 AM	H2 MFC set to  0.000000
3/10/2010	11:08:08 AM	BCl3 MFC set to  0.000000
3/10/2010	11:08:08 AM	SiCl4 MFC set to  0.000000
3/10/2010	11:08:08 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:08:08 AM	Tube furnace set to 0
3/10/2010	11:28:08 AM	Helium valve closed
3/10/2010	11:28:08 AM	H2 valve closed
3/10/2010	11:28:08 AM	BCl3 valve closed
3/10/2010	11:28:08 AM	PH3 valve closed
3/10/2010	11:28:08 AM	SiCl4 pre valve closed
3/10/2010	11:28:08 AM	SiCl4 post valve closed
3/10/2010	11:28:08 AM	Main Vac valve closed
3/10/2010	11:28:08 AM	Bypass valve closed
3/10/2010	11:28:08 AM	Bubbler valve closed
3/10/2010	11:28:08 AM	Helium MFC set to  0.000000
3/10/2010	11:28:08 AM	H2 MFC set to  0.000000
3/10/2010	11:28:08 AM	BCl3 MFC set to  0.000000
3/10/2010	11:28:08 AM	SiCl4 MFC set to  0.000000
3/10/2010	11:28:08 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:28:08 AM	Tube furnace set to 0
3/10/2010	11:28:09 AM	Run finished at 11:28 AM
3/10/2010	11:39:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	11:39:54 AM	Recipe started at 11:39 AM
3/10/2010	11:39:54 AM	Helium valve closed
3/10/2010	11:39:54 AM	H2 valve closed
3/10/2010	11:39:54 AM	BCl3 valve closed
3/10/2010	11:39:54 AM	PH3 valve closed
3/10/2010	11:39:54 AM	SiCl4 pre valve closed
3/10/2010	11:39:54 AM	SiCl4 post valve closed
3/10/2010	11:39:54 AM	Main Vac valve closed
3/10/2010	11:39:54 AM	Bubbler valve closed
3/10/2010	11:39:54 AM	Bypass valve opened
3/10/2010	11:39:54 AM	Helium MFC set to  0.000000
3/10/2010	11:39:54 AM	H2 MFC set to  0.000000
3/10/2010	11:39:54 AM	BCl3 MFC set to  0.000000
3/10/2010	11:39:54 AM	SiCl4 MFC set to  0.000000
3/10/2010	11:39:54 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:39:54 AM	Tube furnace set to 0
3/10/2010	11:40:25 AM	Helium valve closed
3/10/2010	11:40:25 AM	H2 valve closed
3/10/2010	11:40:25 AM	BCl3 valve closed
3/10/2010	11:40:25 AM	PH3 valve closed
3/10/2010	11:40:25 AM	SiCl4 pre valve closed
3/10/2010	11:40:25 AM	SiCl4 post valve closed
3/10/2010	11:40:25 AM	Bubbler valve closed
3/10/2010	11:40:25 AM	Main Vac valve opened
3/10/2010	11:40:25 AM	Bypass valve opened
3/10/2010	11:40:25 AM	Helium MFC set to  0.000000
3/10/2010	11:40:25 AM	H2 MFC set to  0.000000
3/10/2010	11:40:25 AM	BCl3 MFC set to  0.000000
3/10/2010	11:40:25 AM	SiCl4 MFC set to  0.000000
3/10/2010	11:40:25 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:40:25 AM	Tube furnace set to 0
3/10/2010	11:40:25 AM	Run finished at 11:40 AM
3/10/2010	11:40:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	11:43:36 AM	Recipe started at 11:43 AM
3/10/2010	11:43:36 AM	H2 valve closed
3/10/2010	11:43:36 AM	BCl3 valve closed
3/10/2010	11:43:36 AM	PH3 valve closed
3/10/2010	11:43:36 AM	SiCl4 pre valve closed
3/10/2010	11:43:36 AM	SiCl4 post valve closed
3/10/2010	11:43:36 AM	Main Vac valve closed
3/10/2010	11:43:36 AM	Bypass valve closed
3/10/2010	11:43:36 AM	Bubbler valve closed
3/10/2010	11:43:36 AM	Helium valve opened
3/10/2010	11:43:36 AM	Helium MFC set to  500.000000
3/10/2010	11:43:36 AM	H2 MFC set to  0.000000
3/10/2010	11:43:36 AM	BCl3 MFC set to  0.000000
3/10/2010	11:43:36 AM	SiCl4 MFC set to  0.000000
3/10/2010	11:43:36 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:43:36 AM	Tube furnace set to 0
3/10/2010	11:44:56 AM	Helium valve closed
3/10/2010	11:44:56 AM	H2 valve closed
3/10/2010	11:44:56 AM	BCl3 valve closed
3/10/2010	11:44:56 AM	PH3 valve closed
3/10/2010	11:44:56 AM	SiCl4 pre valve closed
3/10/2010	11:44:56 AM	SiCl4 post valve closed
3/10/2010	11:44:56 AM	Main Vac valve closed
3/10/2010	11:44:56 AM	Bypass valve closed
3/10/2010	11:44:56 AM	Bubbler valve closed
3/10/2010	11:44:56 AM	Helium MFC set to  0.000000
3/10/2010	11:44:56 AM	H2 MFC set to  0.000000
3/10/2010	11:44:56 AM	BCl3 MFC set to  0.000000
3/10/2010	11:44:56 AM	SiCl4 MFC set to  0.000000
3/10/2010	11:44:56 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:44:56 AM	Tube furnace set to 0
3/10/2010	11:45:11 AM	Helium valve closed
3/10/2010	11:45:11 AM	H2 valve closed
3/10/2010	11:45:11 AM	BCl3 valve closed
3/10/2010	11:45:11 AM	PH3 valve closed
3/10/2010	11:45:11 AM	SiCl4 pre valve closed
3/10/2010	11:45:11 AM	SiCl4 post valve closed
3/10/2010	11:45:11 AM	Main Vac valve closed
3/10/2010	11:45:11 AM	Bubbler valve closed
3/10/2010	11:45:11 AM	Bypass valve opened
3/10/2010	11:45:11 AM	Helium MFC set to  0.000000
3/10/2010	11:45:11 AM	H2 MFC set to  0.000000
3/10/2010	11:45:11 AM	BCl3 MFC set to  0.000000
3/10/2010	11:45:11 AM	SiCl4 MFC set to  0.000000
3/10/2010	11:45:11 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:45:11 AM	Tube furnace set to 0
3/10/2010	11:45:32 AM	Helium valve closed
3/10/2010	11:45:32 AM	H2 valve closed
3/10/2010	11:45:32 AM	BCl3 valve closed
3/10/2010	11:45:32 AM	PH3 valve closed
3/10/2010	11:45:32 AM	SiCl4 pre valve closed
3/10/2010	11:45:32 AM	SiCl4 post valve closed
3/10/2010	11:45:32 AM	Bubbler valve closed
3/10/2010	11:45:32 AM	Main Vac valve opened
3/10/2010	11:45:32 AM	Bypass valve opened
3/10/2010	11:45:32 AM	Helium MFC set to  0.000000
3/10/2010	11:45:32 AM	H2 MFC set to  0.000000
3/10/2010	11:45:32 AM	BCl3 MFC set to  0.000000
3/10/2010	11:45:32 AM	SiCl4 MFC set to  0.000000
3/10/2010	11:45:32 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:45:32 AM	Tube furnace set to 0
3/10/2010	11:50:32 AM	H2 valve closed
3/10/2010	11:50:32 AM	BCl3 valve closed
3/10/2010	11:50:32 AM	PH3 valve closed
3/10/2010	11:50:32 AM	SiCl4 pre valve closed
3/10/2010	11:50:32 AM	SiCl4 post valve closed
3/10/2010	11:50:32 AM	Main Vac valve closed
3/10/2010	11:50:32 AM	Bypass valve closed
3/10/2010	11:50:32 AM	Bubbler valve closed
3/10/2010	11:50:32 AM	Helium valve opened
3/10/2010	11:50:33 AM	Helium MFC set to  500.000000
3/10/2010	11:50:33 AM	H2 MFC set to  0.000000
3/10/2010	11:50:33 AM	BCl3 MFC set to  0.000000
3/10/2010	11:50:33 AM	SiCl4 MFC set to  0.000000
3/10/2010	11:50:33 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:50:33 AM	Tube furnace set to 0
3/10/2010	11:51:52 AM	Helium valve closed
3/10/2010	11:51:52 AM	H2 valve closed
3/10/2010	11:51:52 AM	BCl3 valve closed
3/10/2010	11:51:52 AM	PH3 valve closed
3/10/2010	11:51:52 AM	SiCl4 pre valve closed
3/10/2010	11:51:52 AM	SiCl4 post valve closed
3/10/2010	11:51:52 AM	Main Vac valve closed
3/10/2010	11:51:52 AM	Bypass valve closed
3/10/2010	11:51:52 AM	Bubbler valve closed
3/10/2010	11:51:52 AM	Helium MFC set to  0.000000
3/10/2010	11:51:52 AM	H2 MFC set to  0.000000
3/10/2010	11:51:52 AM	BCl3 MFC set to  0.000000
3/10/2010	11:51:52 AM	SiCl4 MFC set to  0.000000
3/10/2010	11:51:52 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:51:52 AM	Tube furnace set to 0
3/10/2010	11:52:07 AM	Helium valve closed
3/10/2010	11:52:07 AM	H2 valve closed
3/10/2010	11:52:07 AM	BCl3 valve closed
3/10/2010	11:52:07 AM	PH3 valve closed
3/10/2010	11:52:07 AM	SiCl4 pre valve closed
3/10/2010	11:52:07 AM	SiCl4 post valve closed
3/10/2010	11:52:07 AM	Main Vac valve closed
3/10/2010	11:52:07 AM	Bubbler valve closed
3/10/2010	11:52:07 AM	Bypass valve opened
3/10/2010	11:52:07 AM	Helium MFC set to  0.000000
3/10/2010	11:52:07 AM	H2 MFC set to  0.000000
3/10/2010	11:52:07 AM	BCl3 MFC set to  0.000000
3/10/2010	11:52:07 AM	SiCl4 MFC set to  0.000000
3/10/2010	11:52:07 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:52:07 AM	Tube furnace set to 0
3/10/2010	11:52:28 AM	Helium valve closed
3/10/2010	11:52:28 AM	H2 valve closed
3/10/2010	11:52:28 AM	BCl3 valve closed
3/10/2010	11:52:28 AM	PH3 valve closed
3/10/2010	11:52:28 AM	SiCl4 pre valve closed
3/10/2010	11:52:28 AM	SiCl4 post valve closed
3/10/2010	11:52:28 AM	Bubbler valve closed
3/10/2010	11:52:28 AM	Main Vac valve opened
3/10/2010	11:52:28 AM	Bypass valve opened
3/10/2010	11:52:28 AM	Helium MFC set to  0.000000
3/10/2010	11:52:28 AM	H2 MFC set to  0.000000
3/10/2010	11:52:28 AM	BCl3 MFC set to  0.000000
3/10/2010	11:52:28 AM	SiCl4 MFC set to  0.000000
3/10/2010	11:52:28 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:52:28 AM	Tube furnace set to 0
3/10/2010	11:57:28 AM	H2 valve closed
3/10/2010	11:57:28 AM	BCl3 valve closed
3/10/2010	11:57:28 AM	PH3 valve closed
3/10/2010	11:57:28 AM	SiCl4 pre valve closed
3/10/2010	11:57:28 AM	SiCl4 post valve closed
3/10/2010	11:57:28 AM	Main Vac valve closed
3/10/2010	11:57:28 AM	Bypass valve closed
3/10/2010	11:57:28 AM	Bubbler valve closed
3/10/2010	11:57:28 AM	Helium valve opened
3/10/2010	11:57:28 AM	Helium MFC set to  500.000000
3/10/2010	11:57:28 AM	H2 MFC set to  0.000000
3/10/2010	11:57:28 AM	BCl3 MFC set to  0.000000
3/10/2010	11:57:28 AM	SiCl4 MFC set to  0.000000
3/10/2010	11:57:28 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:57:28 AM	Tube furnace set to 0
3/10/2010	11:58:47 AM	Helium valve closed
3/10/2010	11:58:47 AM	H2 valve closed
3/10/2010	11:58:47 AM	BCl3 valve closed
3/10/2010	11:58:47 AM	PH3 valve closed
3/10/2010	11:58:47 AM	SiCl4 pre valve closed
3/10/2010	11:58:47 AM	SiCl4 post valve closed
3/10/2010	11:58:47 AM	Main Vac valve closed
3/10/2010	11:58:47 AM	Bypass valve closed
3/10/2010	11:58:47 AM	Bubbler valve closed
3/10/2010	11:58:47 AM	Helium MFC set to  0.000000
3/10/2010	11:58:47 AM	H2 MFC set to  0.000000
3/10/2010	11:58:47 AM	BCl3 MFC set to  0.000000
3/10/2010	11:58:47 AM	SiCl4 MFC set to  0.000000
3/10/2010	11:58:47 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:58:47 AM	Tube furnace set to 0
3/10/2010	11:59:03 AM	Helium valve closed
3/10/2010	11:59:03 AM	H2 valve closed
3/10/2010	11:59:03 AM	BCl3 valve closed
3/10/2010	11:59:03 AM	PH3 valve closed
3/10/2010	11:59:03 AM	SiCl4 pre valve closed
3/10/2010	11:59:03 AM	SiCl4 post valve closed
3/10/2010	11:59:03 AM	Main Vac valve closed
3/10/2010	11:59:03 AM	Bubbler valve closed
3/10/2010	11:59:03 AM	Bypass valve opened
3/10/2010	11:59:03 AM	Helium MFC set to  0.000000
3/10/2010	11:59:03 AM	H2 MFC set to  0.000000
3/10/2010	11:59:03 AM	BCl3 MFC set to  0.000000
3/10/2010	11:59:03 AM	SiCl4 MFC set to  0.000000
3/10/2010	11:59:03 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:59:03 AM	Tube furnace set to 0
3/10/2010	11:59:24 AM	Helium valve closed
3/10/2010	11:59:24 AM	H2 valve closed
3/10/2010	11:59:24 AM	BCl3 valve closed
3/10/2010	11:59:24 AM	PH3 valve closed
3/10/2010	11:59:24 AM	SiCl4 pre valve closed
3/10/2010	11:59:24 AM	SiCl4 post valve closed
3/10/2010	11:59:24 AM	Bubbler valve closed
3/10/2010	11:59:24 AM	Main Vac valve opened
3/10/2010	11:59:24 AM	Bypass valve opened
3/10/2010	11:59:24 AM	Helium MFC set to  0.000000
3/10/2010	11:59:24 AM	H2 MFC set to  0.000000
3/10/2010	11:59:24 AM	BCl3 MFC set to  0.000000
3/10/2010	11:59:24 AM	SiCl4 MFC set to  0.000000
3/10/2010	11:59:24 AM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:59:24 AM	Tube furnace set to 0
3/10/2010	12:02:16 PM	Run aborted at 12:02 PM
3/10/2010	12:02:16 PM	Helium valve closed
3/10/2010	12:02:16 PM	H2 valve closed
3/10/2010	12:02:16 PM	BCl3 valve closed
3/10/2010	12:02:16 PM	PH3 valve closed
3/10/2010	12:02:16 PM	SiCl4 pre valve closed
3/10/2010	12:02:16 PM	SiCl4 post valve closed
3/10/2010	12:02:16 PM	Bypass valve closed
3/10/2010	12:02:16 PM	Main Vac valve closed
3/10/2010	12:02:16 PM	Bubbler valve closed
3/10/2010	12:02:16 PM	Helium MFC set to  0.000000
3/10/2010	12:02:16 PM	H2 MFC set to  0.000000
3/10/2010	12:02:16 PM	BCl3 MFC set to  0.000000
3/10/2010	12:02:16 PM	SiCl4 MFC set to  0.000000
3/10/2010	12:02:16 PM	Tube furnace set to 0
3/10/2010	12:02:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	12:02:20 PM	Recipe started at 12:02 PM
3/10/2010	12:02:20 PM	Helium valve closed
3/10/2010	12:02:20 PM	H2 valve closed
3/10/2010	12:02:20 PM	BCl3 valve closed
3/10/2010	12:02:20 PM	PH3 valve closed
3/10/2010	12:02:20 PM	SiCl4 pre valve closed
3/10/2010	12:02:20 PM	SiCl4 post valve closed
3/10/2010	12:02:20 PM	Main Vac valve closed
3/10/2010	12:02:20 PM	Bubbler valve closed
3/10/2010	12:02:20 PM	Bypass valve opened
3/10/2010	12:02:20 PM	Helium MFC set to  0.000000
3/10/2010	12:02:20 PM	H2 MFC set to  0.000000
3/10/2010	12:02:20 PM	BCl3 MFC set to  0.000000
3/10/2010	12:02:20 PM	SiCl4 MFC set to  0.000000
3/10/2010	12:02:20 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	12:02:20 PM	Tube furnace set to 0
3/10/2010	12:02:21 PM	Helium valve closed
3/10/2010	12:02:21 PM	H2 valve closed
3/10/2010	12:02:21 PM	BCl3 valve closed
3/10/2010	12:02:21 PM	PH3 valve closed
3/10/2010	12:02:21 PM	SiCl4 pre valve closed
3/10/2010	12:02:21 PM	SiCl4 post valve closed
3/10/2010	12:02:21 PM	Bubbler valve closed
3/10/2010	12:02:21 PM	Main Vac valve opened
3/10/2010	12:02:21 PM	Bypass valve opened
3/10/2010	12:02:21 PM	Helium MFC set to  0.000000
3/10/2010	12:02:21 PM	H2 MFC set to  0.000000
3/10/2010	12:02:21 PM	BCl3 MFC set to  0.000000
3/10/2010	12:02:21 PM	SiCl4 MFC set to  0.000000
3/10/2010	12:02:21 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	12:02:21 PM	Tube furnace set to 0
3/10/2010	12:02:21 PM	Run finished at 12:02 PM
3/10/2010	12:02:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	12:03:38 PM	Main Vac valve closed
3/10/2010	12:03:39 PM	Bypass valve closed
3/10/2010	12:03:44 PM	Bypass valve opened
3/10/2010	12:03:44 PM	Main Vac valve opened
3/10/2010	12:03:55 PM	Recipe started at 12:03 PM
3/10/2010	12:03:55 PM	Helium valve closed
3/10/2010	12:03:55 PM	BCl3 valve closed
3/10/2010	12:03:55 PM	PH3 valve closed
3/10/2010	12:03:55 PM	SiCl4 pre valve closed
3/10/2010	12:03:55 PM	SiCl4 post valve closed
3/10/2010	12:03:55 PM	Main Vac valve closed
3/10/2010	12:03:55 PM	Bypass valve closed
3/10/2010	12:03:55 PM	Bubbler valve closed
3/10/2010	12:03:55 PM	H2 valve opened
3/10/2010	12:03:55 PM	Helium MFC set to  0.000000
3/10/2010	12:03:55 PM	H2 MFC set to  500.000000
3/10/2010	12:03:55 PM	BCl3 MFC set to  0.000000
3/10/2010	12:03:55 PM	SiCl4 MFC set to  0.000000
3/10/2010	12:03:55 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	12:03:55 PM	Tube furnace set to 0
3/10/2010	12:05:15 PM	Helium valve closed
3/10/2010	12:05:15 PM	BCl3 valve closed
3/10/2010	12:05:15 PM	PH3 valve closed
3/10/2010	12:05:15 PM	SiCl4 pre valve closed
3/10/2010	12:05:15 PM	SiCl4 post valve closed
3/10/2010	12:05:15 PM	Main Vac valve closed
3/10/2010	12:05:15 PM	Bypass valve closed
3/10/2010	12:05:15 PM	H2 valve opened
3/10/2010	12:05:15 PM	Bubbler valve opened
3/10/2010	12:05:15 PM	Helium MFC set to  0.000000
3/10/2010	12:05:15 PM	H2 MFC set to  500.000000
3/10/2010	12:05:15 PM	BCl3 MFC set to  0.000000
3/10/2010	12:05:15 PM	SiCl4 MFC set to  0.000000
3/10/2010	12:05:15 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	12:05:15 PM	Tube furnace set to 0
3/10/2010	12:25:15 PM	Helium valve closed
3/10/2010	12:25:15 PM	PH3 valve closed
3/10/2010	12:25:15 PM	Main Vac valve closed
3/10/2010	12:25:15 PM	Bypass valve closed
3/10/2010	12:25:15 PM	H2 valve opened
3/10/2010	12:25:15 PM	BCl3 valve opened
3/10/2010	12:25:15 PM	SiCl4 pre valve opened
3/10/2010	12:25:15 PM	SiCl4 post valve opened
3/10/2010	12:25:15 PM	Bubbler valve opened
3/10/2010	12:25:15 PM	Helium MFC set to  0.000000
3/10/2010	12:25:15 PM	H2 MFC set to  500.000000
3/10/2010	12:25:15 PM	BCl3 MFC set to  35.000000
3/10/2010	12:25:15 PM	SiCl4 MFC set to  325.000000
3/10/2010	12:25:15 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	12:25:15 PM	Tube furnace set to 0
3/10/2010	12:35:15 PM	Helium valve closed
3/10/2010	12:35:15 PM	BCl3 valve closed
3/10/2010	12:35:15 PM	PH3 valve closed
3/10/2010	12:35:15 PM	SiCl4 pre valve closed
3/10/2010	12:35:15 PM	SiCl4 post valve closed
3/10/2010	12:35:15 PM	Main Vac valve closed
3/10/2010	12:35:15 PM	Bypass valve closed
3/10/2010	12:35:15 PM	H2 valve opened
3/10/2010	12:35:15 PM	Bubbler valve opened
3/10/2010	12:35:15 PM	Helium MFC set to  0.000000
3/10/2010	12:35:15 PM	H2 MFC set to  500.000000
3/10/2010	12:35:15 PM	BCl3 MFC set to  0.000000
3/10/2010	12:35:15 PM	SiCl4 MFC set to  0.000000
3/10/2010	12:35:15 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	12:35:15 PM	Tube furnace set to 0
3/10/2010	12:55:15 PM	H2 valve closed
3/10/2010	12:55:15 PM	BCl3 valve closed
3/10/2010	12:55:15 PM	PH3 valve closed
3/10/2010	12:55:15 PM	SiCl4 pre valve closed
3/10/2010	12:55:15 PM	SiCl4 post valve closed
3/10/2010	12:55:15 PM	Main Vac valve closed
3/10/2010	12:55:15 PM	Bypass valve closed
3/10/2010	12:55:15 PM	Helium valve opened
3/10/2010	12:55:15 PM	Bubbler valve opened
3/10/2010	12:55:15 PM	Helium MFC set to  500.000000
3/10/2010	12:55:15 PM	H2 MFC set to  0.000000
3/10/2010	12:55:15 PM	BCl3 MFC set to  0.000000
3/10/2010	12:55:15 PM	SiCl4 MFC set to  0.000000
3/10/2010	12:55:15 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	12:55:15 PM	Tube furnace set to 0
3/10/2010	1:15:16 PM	Helium valve closed
3/10/2010	1:15:16 PM	H2 valve closed
3/10/2010	1:15:16 PM	BCl3 valve closed
3/10/2010	1:15:16 PM	PH3 valve closed
3/10/2010	1:15:16 PM	SiCl4 pre valve closed
3/10/2010	1:15:16 PM	SiCl4 post valve closed
3/10/2010	1:15:16 PM	Main Vac valve closed
3/10/2010	1:15:16 PM	Bypass valve closed
3/10/2010	1:15:16 PM	Bubbler valve closed
3/10/2010	1:15:16 PM	Helium MFC set to  0.000000
3/10/2010	1:15:16 PM	H2 MFC set to  0.000000
3/10/2010	1:15:16 PM	BCl3 MFC set to  0.000000
3/10/2010	1:15:16 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:15:16 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:15:16 PM	Tube furnace set to 0
3/10/2010	1:15:16 PM	Run finished at 1:15 PM
3/10/2010	1:29:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	1:29:34 PM	Recipe started at 1:29 PM
3/10/2010	1:29:34 PM	Helium valve closed
3/10/2010	1:29:34 PM	H2 valve closed
3/10/2010	1:29:34 PM	BCl3 valve closed
3/10/2010	1:29:34 PM	PH3 valve closed
3/10/2010	1:29:34 PM	SiCl4 pre valve closed
3/10/2010	1:29:34 PM	SiCl4 post valve closed
3/10/2010	1:29:34 PM	Main Vac valve closed
3/10/2010	1:29:34 PM	Bubbler valve closed
3/10/2010	1:29:34 PM	Bypass valve opened
3/10/2010	1:29:34 PM	Helium MFC set to  0.000000
3/10/2010	1:29:34 PM	H2 MFC set to  0.000000
3/10/2010	1:29:34 PM	BCl3 MFC set to  0.000000
3/10/2010	1:29:34 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:29:34 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:29:34 PM	Tube furnace set to 0
3/10/2010	1:30:05 PM	Helium valve closed
3/10/2010	1:30:05 PM	H2 valve closed
3/10/2010	1:30:05 PM	BCl3 valve closed
3/10/2010	1:30:05 PM	PH3 valve closed
3/10/2010	1:30:05 PM	SiCl4 pre valve closed
3/10/2010	1:30:05 PM	SiCl4 post valve closed
3/10/2010	1:30:05 PM	Bubbler valve closed
3/10/2010	1:30:05 PM	Main Vac valve opened
3/10/2010	1:30:05 PM	Bypass valve opened
3/10/2010	1:30:05 PM	Helium MFC set to  0.000000
3/10/2010	1:30:05 PM	H2 MFC set to  0.000000
3/10/2010	1:30:05 PM	BCl3 MFC set to  0.000000
3/10/2010	1:30:05 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:30:05 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:30:05 PM	Tube furnace set to 0
3/10/2010	1:30:05 PM	Run finished at 1:30 PM
3/10/2010	1:30:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	1:30:51 PM	Recipe started at 1:30 PM
3/10/2010	1:30:51 PM	H2 valve closed
3/10/2010	1:30:51 PM	BCl3 valve closed
3/10/2010	1:30:51 PM	PH3 valve closed
3/10/2010	1:30:51 PM	SiCl4 pre valve closed
3/10/2010	1:30:51 PM	SiCl4 post valve closed
3/10/2010	1:30:51 PM	Main Vac valve closed
3/10/2010	1:30:51 PM	Bypass valve closed
3/10/2010	1:30:51 PM	Bubbler valve closed
3/10/2010	1:30:51 PM	Helium valve opened
3/10/2010	1:30:51 PM	Helium MFC set to  500.000000
3/10/2010	1:30:51 PM	H2 MFC set to  0.000000
3/10/2010	1:30:51 PM	BCl3 MFC set to  0.000000
3/10/2010	1:30:51 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:30:51 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:30:51 PM	Tube furnace set to 0
3/10/2010	1:32:11 PM	Helium valve closed
3/10/2010	1:32:11 PM	H2 valve closed
3/10/2010	1:32:11 PM	BCl3 valve closed
3/10/2010	1:32:11 PM	PH3 valve closed
3/10/2010	1:32:11 PM	SiCl4 pre valve closed
3/10/2010	1:32:11 PM	SiCl4 post valve closed
3/10/2010	1:32:11 PM	Main Vac valve closed
3/10/2010	1:32:11 PM	Bypass valve closed
3/10/2010	1:32:11 PM	Bubbler valve closed
3/10/2010	1:32:11 PM	Helium MFC set to  0.000000
3/10/2010	1:32:11 PM	H2 MFC set to  0.000000
3/10/2010	1:32:11 PM	BCl3 MFC set to  0.000000
3/10/2010	1:32:11 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:32:11 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:32:11 PM	Tube furnace set to 0
3/10/2010	1:32:26 PM	Helium valve closed
3/10/2010	1:32:26 PM	H2 valve closed
3/10/2010	1:32:26 PM	BCl3 valve closed
3/10/2010	1:32:26 PM	PH3 valve closed
3/10/2010	1:32:26 PM	SiCl4 pre valve closed
3/10/2010	1:32:26 PM	SiCl4 post valve closed
3/10/2010	1:32:26 PM	Main Vac valve closed
3/10/2010	1:32:26 PM	Bubbler valve closed
3/10/2010	1:32:26 PM	Bypass valve opened
3/10/2010	1:32:26 PM	Helium MFC set to  0.000000
3/10/2010	1:32:26 PM	H2 MFC set to  0.000000
3/10/2010	1:32:26 PM	BCl3 MFC set to  0.000000
3/10/2010	1:32:26 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:32:26 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:32:26 PM	Tube furnace set to 0
3/10/2010	1:32:47 PM	Helium valve closed
3/10/2010	1:32:47 PM	H2 valve closed
3/10/2010	1:32:47 PM	BCl3 valve closed
3/10/2010	1:32:47 PM	PH3 valve closed
3/10/2010	1:32:47 PM	SiCl4 pre valve closed
3/10/2010	1:32:47 PM	SiCl4 post valve closed
3/10/2010	1:32:47 PM	Bubbler valve closed
3/10/2010	1:32:47 PM	Main Vac valve opened
3/10/2010	1:32:47 PM	Bypass valve opened
3/10/2010	1:32:47 PM	Helium MFC set to  0.000000
3/10/2010	1:32:47 PM	H2 MFC set to  0.000000
3/10/2010	1:32:47 PM	BCl3 MFC set to  0.000000
3/10/2010	1:32:47 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:32:47 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:32:47 PM	Tube furnace set to 0
3/10/2010	1:37:48 PM	H2 valve closed
3/10/2010	1:37:48 PM	BCl3 valve closed
3/10/2010	1:37:48 PM	PH3 valve closed
3/10/2010	1:37:48 PM	SiCl4 pre valve closed
3/10/2010	1:37:48 PM	SiCl4 post valve closed
3/10/2010	1:37:48 PM	Main Vac valve closed
3/10/2010	1:37:48 PM	Bypass valve closed
3/10/2010	1:37:48 PM	Bubbler valve closed
3/10/2010	1:37:48 PM	Helium valve opened
3/10/2010	1:37:48 PM	Helium MFC set to  500.000000
3/10/2010	1:37:48 PM	H2 MFC set to  0.000000
3/10/2010	1:37:48 PM	BCl3 MFC set to  0.000000
3/10/2010	1:37:48 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:37:48 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:37:48 PM	Tube furnace set to 0
3/10/2010	1:39:07 PM	Helium valve closed
3/10/2010	1:39:07 PM	H2 valve closed
3/10/2010	1:39:07 PM	BCl3 valve closed
3/10/2010	1:39:07 PM	PH3 valve closed
3/10/2010	1:39:07 PM	SiCl4 pre valve closed
3/10/2010	1:39:07 PM	SiCl4 post valve closed
3/10/2010	1:39:07 PM	Main Vac valve closed
3/10/2010	1:39:07 PM	Bypass valve closed
3/10/2010	1:39:07 PM	Bubbler valve closed
3/10/2010	1:39:07 PM	Helium MFC set to  0.000000
3/10/2010	1:39:07 PM	H2 MFC set to  0.000000
3/10/2010	1:39:07 PM	BCl3 MFC set to  0.000000
3/10/2010	1:39:07 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:39:07 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:39:07 PM	Tube furnace set to 0
3/10/2010	1:39:22 PM	Helium valve closed
3/10/2010	1:39:22 PM	H2 valve closed
3/10/2010	1:39:22 PM	BCl3 valve closed
3/10/2010	1:39:22 PM	PH3 valve closed
3/10/2010	1:39:22 PM	SiCl4 pre valve closed
3/10/2010	1:39:22 PM	SiCl4 post valve closed
3/10/2010	1:39:22 PM	Main Vac valve closed
3/10/2010	1:39:22 PM	Bubbler valve closed
3/10/2010	1:39:22 PM	Bypass valve opened
3/10/2010	1:39:22 PM	Helium MFC set to  0.000000
3/10/2010	1:39:22 PM	H2 MFC set to  0.000000
3/10/2010	1:39:22 PM	BCl3 MFC set to  0.000000
3/10/2010	1:39:22 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:39:22 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:39:22 PM	Tube furnace set to 0
3/10/2010	1:39:43 PM	Helium valve closed
3/10/2010	1:39:43 PM	H2 valve closed
3/10/2010	1:39:43 PM	BCl3 valve closed
3/10/2010	1:39:43 PM	PH3 valve closed
3/10/2010	1:39:43 PM	SiCl4 pre valve closed
3/10/2010	1:39:43 PM	SiCl4 post valve closed
3/10/2010	1:39:43 PM	Bubbler valve closed
3/10/2010	1:39:43 PM	Main Vac valve opened
3/10/2010	1:39:43 PM	Bypass valve opened
3/10/2010	1:39:43 PM	Helium MFC set to  0.000000
3/10/2010	1:39:43 PM	H2 MFC set to  0.000000
3/10/2010	1:39:43 PM	BCl3 MFC set to  0.000000
3/10/2010	1:39:43 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:39:43 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:39:43 PM	Tube furnace set to 0
3/10/2010	1:44:43 PM	H2 valve closed
3/10/2010	1:44:43 PM	BCl3 valve closed
3/10/2010	1:44:43 PM	PH3 valve closed
3/10/2010	1:44:43 PM	SiCl4 pre valve closed
3/10/2010	1:44:43 PM	SiCl4 post valve closed
3/10/2010	1:44:43 PM	Main Vac valve closed
3/10/2010	1:44:43 PM	Bypass valve closed
3/10/2010	1:44:43 PM	Bubbler valve closed
3/10/2010	1:44:43 PM	Helium valve opened
3/10/2010	1:44:43 PM	Helium MFC set to  500.000000
3/10/2010	1:44:43 PM	H2 MFC set to  0.000000
3/10/2010	1:44:43 PM	BCl3 MFC set to  0.000000
3/10/2010	1:44:43 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:44:43 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:44:43 PM	Tube furnace set to 0
3/10/2010	1:46:02 PM	Helium valve closed
3/10/2010	1:46:02 PM	H2 valve closed
3/10/2010	1:46:02 PM	BCl3 valve closed
3/10/2010	1:46:02 PM	PH3 valve closed
3/10/2010	1:46:02 PM	SiCl4 pre valve closed
3/10/2010	1:46:02 PM	SiCl4 post valve closed
3/10/2010	1:46:02 PM	Main Vac valve closed
3/10/2010	1:46:02 PM	Bypass valve closed
3/10/2010	1:46:02 PM	Bubbler valve closed
3/10/2010	1:46:02 PM	Helium MFC set to  0.000000
3/10/2010	1:46:02 PM	H2 MFC set to  0.000000
3/10/2010	1:46:02 PM	BCl3 MFC set to  0.000000
3/10/2010	1:46:02 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:46:02 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:46:02 PM	Tube furnace set to 0
3/10/2010	1:46:18 PM	Helium valve closed
3/10/2010	1:46:18 PM	H2 valve closed
3/10/2010	1:46:18 PM	BCl3 valve closed
3/10/2010	1:46:18 PM	PH3 valve closed
3/10/2010	1:46:18 PM	SiCl4 pre valve closed
3/10/2010	1:46:18 PM	SiCl4 post valve closed
3/10/2010	1:46:18 PM	Main Vac valve closed
3/10/2010	1:46:18 PM	Bubbler valve closed
3/10/2010	1:46:18 PM	Bypass valve opened
3/10/2010	1:46:18 PM	Helium MFC set to  0.000000
3/10/2010	1:46:18 PM	H2 MFC set to  0.000000
3/10/2010	1:46:18 PM	BCl3 MFC set to  0.000000
3/10/2010	1:46:18 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:46:18 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:46:18 PM	Tube furnace set to 0
3/10/2010	1:46:39 PM	Helium valve closed
3/10/2010	1:46:39 PM	H2 valve closed
3/10/2010	1:46:39 PM	BCl3 valve closed
3/10/2010	1:46:39 PM	PH3 valve closed
3/10/2010	1:46:39 PM	SiCl4 pre valve closed
3/10/2010	1:46:39 PM	SiCl4 post valve closed
3/10/2010	1:46:39 PM	Bubbler valve closed
3/10/2010	1:46:39 PM	Main Vac valve opened
3/10/2010	1:46:39 PM	Bypass valve opened
3/10/2010	1:46:39 PM	Helium MFC set to  0.000000
3/10/2010	1:46:39 PM	H2 MFC set to  0.000000
3/10/2010	1:46:39 PM	BCl3 MFC set to  0.000000
3/10/2010	1:46:39 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:46:39 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:46:39 PM	Tube furnace set to 0
3/10/2010	1:46:50 PM	Run aborted at 1:46 PM
3/10/2010	1:46:50 PM	Helium valve closed
3/10/2010	1:46:50 PM	H2 valve closed
3/10/2010	1:46:50 PM	BCl3 valve closed
3/10/2010	1:46:50 PM	PH3 valve closed
3/10/2010	1:46:50 PM	SiCl4 pre valve closed
3/10/2010	1:46:50 PM	SiCl4 post valve closed
3/10/2010	1:46:50 PM	Bypass valve closed
3/10/2010	1:46:50 PM	Main Vac valve closed
3/10/2010	1:46:50 PM	Bubbler valve closed
3/10/2010	1:46:50 PM	Helium MFC set to  0.000000
3/10/2010	1:46:50 PM	H2 MFC set to  0.000000
3/10/2010	1:46:50 PM	BCl3 MFC set to  0.000000
3/10/2010	1:46:50 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:46:50 PM	Tube furnace set to 0
3/10/2010	1:46:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	1:46:55 PM	Recipe started at 1:46 PM
3/10/2010	1:46:55 PM	Helium valve closed
3/10/2010	1:46:55 PM	H2 valve closed
3/10/2010	1:46:55 PM	BCl3 valve closed
3/10/2010	1:46:55 PM	PH3 valve closed
3/10/2010	1:46:55 PM	SiCl4 pre valve closed
3/10/2010	1:46:55 PM	SiCl4 post valve closed
3/10/2010	1:46:55 PM	Main Vac valve closed
3/10/2010	1:46:55 PM	Bubbler valve closed
3/10/2010	1:46:55 PM	Bypass valve opened
3/10/2010	1:46:55 PM	Helium MFC set to  0.000000
3/10/2010	1:46:55 PM	H2 MFC set to  0.000000
3/10/2010	1:46:55 PM	BCl3 MFC set to  0.000000
3/10/2010	1:46:55 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:46:55 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:46:55 PM	Tube furnace set to 0
3/10/2010	1:46:55 PM	Helium valve closed
3/10/2010	1:46:55 PM	H2 valve closed
3/10/2010	1:46:55 PM	BCl3 valve closed
3/10/2010	1:46:55 PM	PH3 valve closed
3/10/2010	1:46:55 PM	SiCl4 pre valve closed
3/10/2010	1:46:55 PM	SiCl4 post valve closed
3/10/2010	1:46:55 PM	Bubbler valve closed
3/10/2010	1:46:55 PM	Main Vac valve opened
3/10/2010	1:46:55 PM	Bypass valve opened
3/10/2010	1:46:55 PM	Helium MFC set to  0.000000
3/10/2010	1:46:55 PM	H2 MFC set to  0.000000
3/10/2010	1:46:55 PM	BCl3 MFC set to  0.000000
3/10/2010	1:46:55 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:46:55 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:46:55 PM	Tube furnace set to 0
3/10/2010	1:46:55 PM	Run finished at 1:46 PM
3/10/2010	1:46:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	1:47:22 PM	Recipe started at 1:47 PM
3/10/2010	1:47:22 PM	Helium valve closed
3/10/2010	1:47:22 PM	BCl3 valve closed
3/10/2010	1:47:22 PM	PH3 valve closed
3/10/2010	1:47:22 PM	SiCl4 pre valve closed
3/10/2010	1:47:22 PM	SiCl4 post valve closed
3/10/2010	1:47:22 PM	Main Vac valve closed
3/10/2010	1:47:22 PM	Bypass valve closed
3/10/2010	1:47:22 PM	Bubbler valve closed
3/10/2010	1:47:22 PM	H2 valve opened
3/10/2010	1:47:22 PM	Helium MFC set to  0.000000
3/10/2010	1:47:22 PM	H2 MFC set to  500.000000
3/10/2010	1:47:22 PM	BCl3 MFC set to  0.000000
3/10/2010	1:47:22 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:47:22 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:47:22 PM	Tube furnace set to 0
3/10/2010	1:48:41 PM	Helium valve closed
3/10/2010	1:48:41 PM	BCl3 valve closed
3/10/2010	1:48:41 PM	PH3 valve closed
3/10/2010	1:48:41 PM	SiCl4 pre valve closed
3/10/2010	1:48:41 PM	SiCl4 post valve closed
3/10/2010	1:48:41 PM	Main Vac valve closed
3/10/2010	1:48:41 PM	Bypass valve closed
3/10/2010	1:48:41 PM	H2 valve opened
3/10/2010	1:48:41 PM	Bubbler valve opened
3/10/2010	1:48:41 PM	Helium MFC set to  0.000000
3/10/2010	1:48:41 PM	H2 MFC set to  500.000000
3/10/2010	1:48:41 PM	BCl3 MFC set to  0.000000
3/10/2010	1:48:41 PM	SiCl4 MFC set to  0.000000
3/10/2010	1:48:41 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	1:48:41 PM	Tube furnace set to 0
3/10/2010	2:08:42 PM	Helium valve closed
3/10/2010	2:08:42 PM	PH3 valve closed
3/10/2010	2:08:42 PM	Main Vac valve closed
3/10/2010	2:08:42 PM	Bypass valve closed
3/10/2010	2:08:42 PM	H2 valve opened
3/10/2010	2:08:42 PM	BCl3 valve opened
3/10/2010	2:08:42 PM	SiCl4 pre valve opened
3/10/2010	2:08:42 PM	SiCl4 post valve opened
3/10/2010	2:08:42 PM	Bubbler valve opened
3/10/2010	2:08:42 PM	Helium MFC set to  0.000000
3/10/2010	2:08:42 PM	H2 MFC set to  500.000000
3/10/2010	2:08:42 PM	BCl3 MFC set to  35.000000
3/10/2010	2:08:42 PM	SiCl4 MFC set to  325.000000
3/10/2010	2:08:42 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	2:08:42 PM	Tube furnace set to 0
3/10/2010	2:13:42 PM	Helium valve closed
3/10/2010	2:13:42 PM	BCl3 valve closed
3/10/2010	2:13:42 PM	PH3 valve closed
3/10/2010	2:13:42 PM	SiCl4 pre valve closed
3/10/2010	2:13:42 PM	SiCl4 post valve closed
3/10/2010	2:13:42 PM	Main Vac valve closed
3/10/2010	2:13:42 PM	Bypass valve closed
3/10/2010	2:13:42 PM	H2 valve opened
3/10/2010	2:13:42 PM	Bubbler valve opened
3/10/2010	2:13:42 PM	Helium MFC set to  0.000000
3/10/2010	2:13:42 PM	H2 MFC set to  500.000000
3/10/2010	2:13:42 PM	BCl3 MFC set to  0.000000
3/10/2010	2:13:42 PM	SiCl4 MFC set to  0.000000
3/10/2010	2:13:42 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	2:13:42 PM	Tube furnace set to 0
3/10/2010	2:33:43 PM	H2 valve closed
3/10/2010	2:33:43 PM	BCl3 valve closed
3/10/2010	2:33:43 PM	PH3 valve closed
3/10/2010	2:33:43 PM	SiCl4 pre valve closed
3/10/2010	2:33:43 PM	SiCl4 post valve closed
3/10/2010	2:33:43 PM	Main Vac valve closed
3/10/2010	2:33:43 PM	Bypass valve closed
3/10/2010	2:33:43 PM	Helium valve opened
3/10/2010	2:33:43 PM	Bubbler valve opened
3/10/2010	2:33:43 PM	Helium MFC set to  500.000000
3/10/2010	2:33:43 PM	H2 MFC set to  0.000000
3/10/2010	2:33:43 PM	BCl3 MFC set to  0.000000
3/10/2010	2:33:43 PM	SiCl4 MFC set to  0.000000
3/10/2010	2:33:43 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	2:33:43 PM	Tube furnace set to 0
3/10/2010	2:53:43 PM	Helium valve closed
3/10/2010	2:53:43 PM	H2 valve closed
3/10/2010	2:53:43 PM	BCl3 valve closed
3/10/2010	2:53:43 PM	PH3 valve closed
3/10/2010	2:53:43 PM	SiCl4 pre valve closed
3/10/2010	2:53:43 PM	SiCl4 post valve closed
3/10/2010	2:53:43 PM	Main Vac valve closed
3/10/2010	2:53:43 PM	Bypass valve closed
3/10/2010	2:53:43 PM	Bubbler valve closed
3/10/2010	2:53:43 PM	Helium MFC set to  0.000000
3/10/2010	2:53:43 PM	H2 MFC set to  0.000000
3/10/2010	2:53:43 PM	BCl3 MFC set to  0.000000
3/10/2010	2:53:43 PM	SiCl4 MFC set to  0.000000
3/10/2010	2:53:43 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	2:53:43 PM	Tube furnace set to 0
3/10/2010	2:53:43 PM	Run finished at 2:53 PM
3/10/2010	3:11:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	3:11:17 PM	Recipe started at 3:11 PM
3/10/2010	3:11:17 PM	Helium valve closed
3/10/2010	3:11:17 PM	H2 valve closed
3/10/2010	3:11:17 PM	BCl3 valve closed
3/10/2010	3:11:17 PM	PH3 valve closed
3/10/2010	3:11:17 PM	SiCl4 pre valve closed
3/10/2010	3:11:17 PM	SiCl4 post valve closed
3/10/2010	3:11:17 PM	Main Vac valve closed
3/10/2010	3:11:17 PM	Bubbler valve closed
3/10/2010	3:11:17 PM	Bypass valve opened
3/10/2010	3:11:17 PM	Helium MFC set to  0.000000
3/10/2010	3:11:17 PM	H2 MFC set to  0.000000
3/10/2010	3:11:17 PM	BCl3 MFC set to  0.000000
3/10/2010	3:11:17 PM	SiCl4 MFC set to  0.000000
3/10/2010	3:11:17 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	3:11:17 PM	Tube furnace set to 0
3/10/2010	3:11:48 PM	Helium valve closed
3/10/2010	3:11:48 PM	H2 valve closed
3/10/2010	3:11:48 PM	BCl3 valve closed
3/10/2010	3:11:48 PM	PH3 valve closed
3/10/2010	3:11:48 PM	SiCl4 pre valve closed
3/10/2010	3:11:48 PM	SiCl4 post valve closed
3/10/2010	3:11:48 PM	Bubbler valve closed
3/10/2010	3:11:48 PM	Main Vac valve opened
3/10/2010	3:11:48 PM	Bypass valve opened
3/10/2010	3:11:48 PM	Helium MFC set to  0.000000
3/10/2010	3:11:49 PM	H2 MFC set to  0.000000
3/10/2010	3:11:49 PM	BCl3 MFC set to  0.000000
3/10/2010	3:11:49 PM	SiCl4 MFC set to  0.000000
3/10/2010	3:11:49 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	3:11:49 PM	Tube furnace set to 0
3/10/2010	3:11:49 PM	Run finished at 3:11 PM
3/10/2010	3:11:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	4:27:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2010	4:27:27 PM	Recipe started at 4:27 PM
3/10/2010	4:27:27 PM	H2 valve closed
3/10/2010	4:27:27 PM	BCl3 valve closed
3/10/2010	4:27:27 PM	PH3 valve closed
3/10/2010	4:27:27 PM	SiCl4 pre valve closed
3/10/2010	4:27:27 PM	SiCl4 post valve closed
3/10/2010	4:27:27 PM	Main Vac valve closed
3/10/2010	4:27:27 PM	Bypass valve closed
3/10/2010	4:27:27 PM	Bubbler valve closed
3/10/2010	4:27:27 PM	Helium valve opened
3/10/2010	4:27:27 PM	Helium MFC set to  500.000000
3/10/2010	4:27:27 PM	H2 MFC set to  0.000000
3/10/2010	4:27:27 PM	BCl3 MFC set to  0.000000
3/10/2010	4:27:27 PM	SiCl4 MFC set to  0.000000
3/10/2010	4:27:27 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	4:27:27 PM	Tube furnace set to 0
3/10/2010	4:28:45 PM	Helium valve closed
3/10/2010	4:28:45 PM	H2 valve closed
3/10/2010	4:28:45 PM	BCl3 valve closed
3/10/2010	4:28:45 PM	PH3 valve closed
3/10/2010	4:28:45 PM	SiCl4 pre valve closed
3/10/2010	4:28:45 PM	SiCl4 post valve closed
3/10/2010	4:28:45 PM	Main Vac valve closed
3/10/2010	4:28:45 PM	Bypass valve closed
3/10/2010	4:28:45 PM	Bubbler valve closed
3/10/2010	4:28:45 PM	Helium MFC set to  0.000000
3/10/2010	4:28:45 PM	H2 MFC set to  0.000000
3/10/2010	4:28:45 PM	BCl3 MFC set to  0.000000
3/10/2010	4:28:45 PM	SiCl4 MFC set to  0.000000
3/10/2010	4:28:45 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	4:28:45 PM	Tube furnace set to 0
3/10/2010	4:28:45 PM	Run finished at 4:28 PM
3/10/2010	4:28:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2010	4:28:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	4:28:55 PM	Recipe started at 4:28 PM
3/10/2010	4:28:55 PM	Helium valve closed
3/10/2010	4:28:55 PM	H2 valve closed
3/10/2010	4:28:55 PM	BCl3 valve closed
3/10/2010	4:28:55 PM	PH3 valve closed
3/10/2010	4:28:55 PM	SiCl4 pre valve closed
3/10/2010	4:28:55 PM	SiCl4 post valve closed
3/10/2010	4:28:55 PM	Main Vac valve closed
3/10/2010	4:28:55 PM	Bubbler valve closed
3/10/2010	4:28:55 PM	Bypass valve opened
3/10/2010	4:28:55 PM	Helium MFC set to  0.000000
3/10/2010	4:28:55 PM	H2 MFC set to  0.000000
3/10/2010	4:28:55 PM	BCl3 MFC set to  0.000000
3/10/2010	4:28:55 PM	SiCl4 MFC set to  0.000000
3/10/2010	4:28:55 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	4:28:55 PM	Tube furnace set to 0
3/10/2010	4:29:16 PM	Helium valve closed
3/10/2010	4:29:16 PM	H2 valve closed
3/10/2010	4:29:16 PM	BCl3 valve closed
3/10/2010	4:29:16 PM	PH3 valve closed
3/10/2010	4:29:16 PM	SiCl4 pre valve closed
3/10/2010	4:29:16 PM	SiCl4 post valve closed
3/10/2010	4:29:16 PM	Bubbler valve closed
3/10/2010	4:29:16 PM	Main Vac valve opened
3/10/2010	4:29:16 PM	Bypass valve opened
3/10/2010	4:29:16 PM	Helium MFC set to  0.000000
3/10/2010	4:29:16 PM	H2 MFC set to  0.000000
3/10/2010	4:29:16 PM	BCl3 MFC set to  0.000000
3/10/2010	4:29:16 PM	SiCl4 MFC set to  0.000000
3/10/2010	4:29:16 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	4:29:16 PM	Tube furnace set to 0
3/10/2010	4:29:17 PM	Run finished at 4:29 PM
3/10/2010	4:29:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	4:41:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2010	4:41:14 PM	Recipe started at 4:41 PM
3/10/2010	4:41:14 PM	H2 valve closed
3/10/2010	4:41:14 PM	BCl3 valve closed
3/10/2010	4:41:14 PM	PH3 valve closed
3/10/2010	4:41:14 PM	SiCl4 pre valve closed
3/10/2010	4:41:14 PM	SiCl4 post valve closed
3/10/2010	4:41:14 PM	Main Vac valve closed
3/10/2010	4:41:14 PM	Bypass valve closed
3/10/2010	4:41:14 PM	Bubbler valve closed
3/10/2010	4:41:14 PM	Helium valve opened
3/10/2010	4:41:14 PM	Helium MFC set to  500.000000
3/10/2010	4:41:14 PM	H2 MFC set to  0.000000
3/10/2010	4:41:14 PM	BCl3 MFC set to  0.000000
3/10/2010	4:41:14 PM	SiCl4 MFC set to  0.000000
3/10/2010	4:41:14 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	4:41:14 PM	Tube furnace set to 0
3/10/2010	4:42:33 PM	Helium valve closed
3/10/2010	4:42:33 PM	H2 valve closed
3/10/2010	4:42:33 PM	BCl3 valve closed
3/10/2010	4:42:33 PM	PH3 valve closed
3/10/2010	4:42:33 PM	SiCl4 pre valve closed
3/10/2010	4:42:33 PM	SiCl4 post valve closed
3/10/2010	4:42:33 PM	Main Vac valve closed
3/10/2010	4:42:33 PM	Bypass valve closed
3/10/2010	4:42:33 PM	Bubbler valve closed
3/10/2010	4:42:33 PM	Helium MFC set to  0.000000
3/10/2010	4:42:33 PM	H2 MFC set to  0.000000
3/10/2010	4:42:33 PM	BCl3 MFC set to  0.000000
3/10/2010	4:42:33 PM	SiCl4 MFC set to  0.000000
3/10/2010	4:42:33 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	4:42:33 PM	Tube furnace set to 0
3/10/2010	4:42:33 PM	Run finished at 4:42 PM
3/10/2010	4:42:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2010	4:42:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	4:42:39 PM	Recipe started at 4:42 PM
3/10/2010	4:42:39 PM	Helium valve closed
3/10/2010	4:42:39 PM	H2 valve closed
3/10/2010	4:42:39 PM	BCl3 valve closed
3/10/2010	4:42:39 PM	PH3 valve closed
3/10/2010	4:42:39 PM	SiCl4 pre valve closed
3/10/2010	4:42:39 PM	SiCl4 post valve closed
3/10/2010	4:42:39 PM	Main Vac valve closed
3/10/2010	4:42:39 PM	Bubbler valve closed
3/10/2010	4:42:39 PM	Bypass valve opened
3/10/2010	4:42:39 PM	Helium MFC set to  0.000000
3/10/2010	4:42:39 PM	H2 MFC set to  0.000000
3/10/2010	4:42:39 PM	BCl3 MFC set to  0.000000
3/10/2010	4:42:39 PM	SiCl4 MFC set to  0.000000
3/10/2010	4:42:39 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	4:42:39 PM	Tube furnace set to 0
3/10/2010	4:43:00 PM	Helium valve closed
3/10/2010	4:43:00 PM	H2 valve closed
3/10/2010	4:43:00 PM	BCl3 valve closed
3/10/2010	4:43:00 PM	PH3 valve closed
3/10/2010	4:43:00 PM	SiCl4 pre valve closed
3/10/2010	4:43:00 PM	SiCl4 post valve closed
3/10/2010	4:43:00 PM	Bubbler valve closed
3/10/2010	4:43:00 PM	Main Vac valve opened
3/10/2010	4:43:00 PM	Bypass valve opened
3/10/2010	4:43:00 PM	Helium MFC set to  0.000000
3/10/2010	4:43:00 PM	H2 MFC set to  0.000000
3/10/2010	4:43:00 PM	BCl3 MFC set to  0.000000
3/10/2010	4:43:00 PM	SiCl4 MFC set to  0.000000
3/10/2010	4:43:00 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	4:43:00 PM	Tube furnace set to 0
3/10/2010	4:43:00 PM	Run finished at 4:43 PM
3/10/2010	4:43:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	4:49:26 PM	Main Vac valve closed
3/10/2010	4:49:27 PM	Bypass valve closed
3/10/2010	4:49:38 PM	Bypass valve opened
3/10/2010	4:49:38 PM	Main Vac valve opened
3/10/2010	4:50:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2010	4:50:18 PM	Recipe started at 4:50 PM
3/10/2010	4:50:18 PM	H2 valve closed
3/10/2010	4:50:18 PM	BCl3 valve closed
3/10/2010	4:50:18 PM	PH3 valve closed
3/10/2010	4:50:18 PM	SiCl4 pre valve closed
3/10/2010	4:50:18 PM	SiCl4 post valve closed
3/10/2010	4:50:18 PM	Main Vac valve closed
3/10/2010	4:50:18 PM	Bypass valve closed
3/10/2010	4:50:18 PM	Bubbler valve closed
3/10/2010	4:50:18 PM	Helium valve opened
3/10/2010	4:50:18 PM	Helium MFC set to  500.000000
3/10/2010	4:50:18 PM	H2 MFC set to  0.000000
3/10/2010	4:50:18 PM	BCl3 MFC set to  0.000000
3/10/2010	4:50:18 PM	SiCl4 MFC set to  0.000000
3/10/2010	4:50:18 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	4:50:18 PM	Tube furnace set to 0
3/10/2010	4:51:37 PM	Helium valve closed
3/10/2010	4:51:37 PM	H2 valve closed
3/10/2010	4:51:37 PM	BCl3 valve closed
3/10/2010	4:51:37 PM	PH3 valve closed
3/10/2010	4:51:37 PM	SiCl4 pre valve closed
3/10/2010	4:51:37 PM	SiCl4 post valve closed
3/10/2010	4:51:37 PM	Main Vac valve closed
3/10/2010	4:51:37 PM	Bypass valve closed
3/10/2010	4:51:37 PM	Bubbler valve closed
3/10/2010	4:51:37 PM	Helium MFC set to  0.000000
3/10/2010	4:51:37 PM	H2 MFC set to  0.000000
3/10/2010	4:51:37 PM	BCl3 MFC set to  0.000000
3/10/2010	4:51:37 PM	SiCl4 MFC set to  0.000000
3/10/2010	4:51:37 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	4:51:37 PM	Tube furnace set to 0
3/10/2010	4:51:37 PM	Run finished at 4:51 PM
3/10/2010	4:51:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2010	5:00:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	5:00:12 PM	Recipe started at 5:00 PM
3/10/2010	5:00:12 PM	Helium valve closed
3/10/2010	5:00:12 PM	H2 valve closed
3/10/2010	5:00:12 PM	BCl3 valve closed
3/10/2010	5:00:12 PM	PH3 valve closed
3/10/2010	5:00:12 PM	SiCl4 pre valve closed
3/10/2010	5:00:12 PM	SiCl4 post valve closed
3/10/2010	5:00:12 PM	Main Vac valve closed
3/10/2010	5:00:12 PM	Bubbler valve closed
3/10/2010	5:00:12 PM	Bypass valve opened
3/10/2010	5:00:12 PM	Helium MFC set to  0.000000
3/10/2010	5:00:12 PM	H2 MFC set to  0.000000
3/10/2010	5:00:12 PM	BCl3 MFC set to  0.000000
3/10/2010	5:00:12 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:00:12 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:00:12 PM	Tube furnace set to 0
3/10/2010	5:00:43 PM	Helium valve closed
3/10/2010	5:00:43 PM	H2 valve closed
3/10/2010	5:00:43 PM	BCl3 valve closed
3/10/2010	5:00:43 PM	PH3 valve closed
3/10/2010	5:00:43 PM	SiCl4 pre valve closed
3/10/2010	5:00:43 PM	SiCl4 post valve closed
3/10/2010	5:00:43 PM	Bubbler valve closed
3/10/2010	5:00:43 PM	Main Vac valve opened
3/10/2010	5:00:43 PM	Bypass valve opened
3/10/2010	5:00:43 PM	Helium MFC set to  0.000000
3/10/2010	5:00:43 PM	H2 MFC set to  0.000000
3/10/2010	5:00:43 PM	BCl3 MFC set to  0.000000
3/10/2010	5:00:43 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:00:43 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:00:43 PM	Tube furnace set to 0
3/10/2010	5:00:43 PM	Run finished at 5:00 PM
3/10/2010	5:00:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	5:09:55 PM	Recipe started at 5:09 PM
3/10/2010	5:09:55 PM	H2 valve closed
3/10/2010	5:09:55 PM	BCl3 valve closed
3/10/2010	5:09:55 PM	PH3 valve closed
3/10/2010	5:09:55 PM	SiCl4 pre valve closed
3/10/2010	5:09:55 PM	SiCl4 post valve closed
3/10/2010	5:09:55 PM	Main Vac valve closed
3/10/2010	5:09:55 PM	Bypass valve closed
3/10/2010	5:09:55 PM	Bubbler valve closed
3/10/2010	5:09:55 PM	Helium valve opened
3/10/2010	5:09:55 PM	Helium MFC set to  500.000000
3/10/2010	5:09:55 PM	H2 MFC set to  0.000000
3/10/2010	5:09:55 PM	BCl3 MFC set to  0.000000
3/10/2010	5:09:55 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:09:55 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:09:55 PM	Tube furnace set to 0
3/10/2010	5:11:18 PM	Helium valve closed
3/10/2010	5:11:18 PM	H2 valve closed
3/10/2010	5:11:18 PM	BCl3 valve closed
3/10/2010	5:11:18 PM	PH3 valve closed
3/10/2010	5:11:18 PM	SiCl4 pre valve closed
3/10/2010	5:11:18 PM	SiCl4 post valve closed
3/10/2010	5:11:18 PM	Main Vac valve closed
3/10/2010	5:11:18 PM	Bypass valve closed
3/10/2010	5:11:18 PM	Bubbler valve closed
3/10/2010	5:11:18 PM	Helium MFC set to  0.000000
3/10/2010	5:11:18 PM	H2 MFC set to  0.000000
3/10/2010	5:11:18 PM	BCl3 MFC set to  0.000000
3/10/2010	5:11:18 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:11:18 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:11:18 PM	Tube furnace set to 0
3/10/2010	5:11:33 PM	Helium valve closed
3/10/2010	5:11:33 PM	H2 valve closed
3/10/2010	5:11:33 PM	BCl3 valve closed
3/10/2010	5:11:33 PM	PH3 valve closed
3/10/2010	5:11:33 PM	SiCl4 pre valve closed
3/10/2010	5:11:33 PM	SiCl4 post valve closed
3/10/2010	5:11:33 PM	Main Vac valve closed
3/10/2010	5:11:33 PM	Bubbler valve closed
3/10/2010	5:11:33 PM	Bypass valve opened
3/10/2010	5:11:33 PM	Helium MFC set to  0.000000
3/10/2010	5:11:33 PM	H2 MFC set to  0.000000
3/10/2010	5:11:33 PM	BCl3 MFC set to  0.000000
3/10/2010	5:11:33 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:11:33 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:11:33 PM	Tube furnace set to 0
3/10/2010	5:11:55 PM	Helium valve closed
3/10/2010	5:11:55 PM	H2 valve closed
3/10/2010	5:11:55 PM	BCl3 valve closed
3/10/2010	5:11:55 PM	PH3 valve closed
3/10/2010	5:11:55 PM	SiCl4 pre valve closed
3/10/2010	5:11:55 PM	SiCl4 post valve closed
3/10/2010	5:11:55 PM	Bubbler valve closed
3/10/2010	5:11:55 PM	Main Vac valve opened
3/10/2010	5:11:55 PM	Bypass valve opened
3/10/2010	5:11:55 PM	Helium MFC set to  0.000000
3/10/2010	5:11:55 PM	H2 MFC set to  0.000000
3/10/2010	5:11:55 PM	BCl3 MFC set to  0.000000
3/10/2010	5:11:55 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:11:55 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:11:55 PM	Tube furnace set to 0
3/10/2010	5:16:55 PM	H2 valve closed
3/10/2010	5:16:55 PM	BCl3 valve closed
3/10/2010	5:16:55 PM	PH3 valve closed
3/10/2010	5:16:55 PM	SiCl4 pre valve closed
3/10/2010	5:16:55 PM	SiCl4 post valve closed
3/10/2010	5:16:55 PM	Main Vac valve closed
3/10/2010	5:16:55 PM	Bypass valve closed
3/10/2010	5:16:55 PM	Bubbler valve closed
3/10/2010	5:16:55 PM	Helium valve opened
3/10/2010	5:16:55 PM	Helium MFC set to  500.000000
3/10/2010	5:16:55 PM	H2 MFC set to  0.000000
3/10/2010	5:16:55 PM	BCl3 MFC set to  0.000000
3/10/2010	5:16:55 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:16:55 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:16:55 PM	Tube furnace set to 0
3/10/2010	5:18:18 PM	Helium valve closed
3/10/2010	5:18:18 PM	H2 valve closed
3/10/2010	5:18:18 PM	BCl3 valve closed
3/10/2010	5:18:18 PM	PH3 valve closed
3/10/2010	5:18:18 PM	SiCl4 pre valve closed
3/10/2010	5:18:18 PM	SiCl4 post valve closed
3/10/2010	5:18:18 PM	Main Vac valve closed
3/10/2010	5:18:18 PM	Bypass valve closed
3/10/2010	5:18:18 PM	Bubbler valve closed
3/10/2010	5:18:18 PM	Helium MFC set to  0.000000
3/10/2010	5:18:18 PM	H2 MFC set to  0.000000
3/10/2010	5:18:18 PM	BCl3 MFC set to  0.000000
3/10/2010	5:18:18 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:18:18 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:18:18 PM	Tube furnace set to 0
3/10/2010	5:18:33 PM	Helium valve closed
3/10/2010	5:18:33 PM	H2 valve closed
3/10/2010	5:18:33 PM	BCl3 valve closed
3/10/2010	5:18:33 PM	PH3 valve closed
3/10/2010	5:18:33 PM	SiCl4 pre valve closed
3/10/2010	5:18:33 PM	SiCl4 post valve closed
3/10/2010	5:18:33 PM	Main Vac valve closed
3/10/2010	5:18:33 PM	Bubbler valve closed
3/10/2010	5:18:33 PM	Bypass valve opened
3/10/2010	5:18:33 PM	Helium MFC set to  0.000000
3/10/2010	5:18:33 PM	H2 MFC set to  0.000000
3/10/2010	5:18:33 PM	BCl3 MFC set to  0.000000
3/10/2010	5:18:33 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:18:34 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:18:34 PM	Tube furnace set to 0
3/10/2010	5:18:56 PM	Helium valve closed
3/10/2010	5:18:56 PM	H2 valve closed
3/10/2010	5:18:56 PM	BCl3 valve closed
3/10/2010	5:18:56 PM	PH3 valve closed
3/10/2010	5:18:56 PM	SiCl4 pre valve closed
3/10/2010	5:18:56 PM	SiCl4 post valve closed
3/10/2010	5:18:56 PM	Bubbler valve closed
3/10/2010	5:18:56 PM	Main Vac valve opened
3/10/2010	5:18:56 PM	Bypass valve opened
3/10/2010	5:18:56 PM	Helium MFC set to  0.000000
3/10/2010	5:18:56 PM	H2 MFC set to  0.000000
3/10/2010	5:18:56 PM	BCl3 MFC set to  0.000000
3/10/2010	5:18:56 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:18:56 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:18:56 PM	Tube furnace set to 0
3/10/2010	5:23:56 PM	H2 valve closed
3/10/2010	5:23:56 PM	BCl3 valve closed
3/10/2010	5:23:56 PM	PH3 valve closed
3/10/2010	5:23:56 PM	SiCl4 pre valve closed
3/10/2010	5:23:56 PM	SiCl4 post valve closed
3/10/2010	5:23:56 PM	Main Vac valve closed
3/10/2010	5:23:56 PM	Bypass valve closed
3/10/2010	5:23:56 PM	Bubbler valve closed
3/10/2010	5:23:56 PM	Helium valve opened
3/10/2010	5:23:56 PM	Helium MFC set to  500.000000
3/10/2010	5:23:56 PM	H2 MFC set to  0.000000
3/10/2010	5:23:56 PM	BCl3 MFC set to  0.000000
3/10/2010	5:23:56 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:23:56 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:23:56 PM	Tube furnace set to 0
3/10/2010	5:25:19 PM	Helium valve closed
3/10/2010	5:25:19 PM	H2 valve closed
3/10/2010	5:25:19 PM	BCl3 valve closed
3/10/2010	5:25:19 PM	PH3 valve closed
3/10/2010	5:25:19 PM	SiCl4 pre valve closed
3/10/2010	5:25:19 PM	SiCl4 post valve closed
3/10/2010	5:25:19 PM	Main Vac valve closed
3/10/2010	5:25:19 PM	Bypass valve closed
3/10/2010	5:25:19 PM	Bubbler valve closed
3/10/2010	5:25:19 PM	Helium MFC set to  0.000000
3/10/2010	5:25:19 PM	H2 MFC set to  0.000000
3/10/2010	5:25:19 PM	BCl3 MFC set to  0.000000
3/10/2010	5:25:19 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:25:19 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:25:19 PM	Tube furnace set to 0
3/10/2010	5:25:34 PM	Helium valve closed
3/10/2010	5:25:34 PM	H2 valve closed
3/10/2010	5:25:34 PM	BCl3 valve closed
3/10/2010	5:25:34 PM	PH3 valve closed
3/10/2010	5:25:34 PM	SiCl4 pre valve closed
3/10/2010	5:25:34 PM	SiCl4 post valve closed
3/10/2010	5:25:34 PM	Main Vac valve closed
3/10/2010	5:25:34 PM	Bubbler valve closed
3/10/2010	5:25:34 PM	Bypass valve opened
3/10/2010	5:25:34 PM	Helium MFC set to  0.000000
3/10/2010	5:25:34 PM	H2 MFC set to  0.000000
3/10/2010	5:25:34 PM	BCl3 MFC set to  0.000000
3/10/2010	5:25:34 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:25:34 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:25:34 PM	Tube furnace set to 0
3/10/2010	5:25:56 PM	Helium valve closed
3/10/2010	5:25:56 PM	H2 valve closed
3/10/2010	5:25:56 PM	BCl3 valve closed
3/10/2010	5:25:56 PM	PH3 valve closed
3/10/2010	5:25:56 PM	SiCl4 pre valve closed
3/10/2010	5:25:56 PM	SiCl4 post valve closed
3/10/2010	5:25:56 PM	Bubbler valve closed
3/10/2010	5:25:56 PM	Main Vac valve opened
3/10/2010	5:25:56 PM	Bypass valve opened
3/10/2010	5:25:56 PM	Helium MFC set to  0.000000
3/10/2010	5:25:56 PM	H2 MFC set to  0.000000
3/10/2010	5:25:56 PM	BCl3 MFC set to  0.000000
3/10/2010	5:25:56 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:25:56 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:25:56 PM	Tube furnace set to 0
3/10/2010	5:30:56 PM	Helium valve closed
3/10/2010	5:30:56 PM	H2 valve closed
3/10/2010	5:30:57 PM	BCl3 valve closed
3/10/2010	5:30:57 PM	PH3 valve closed
3/10/2010	5:30:57 PM	SiCl4 pre valve closed
3/10/2010	5:30:57 PM	SiCl4 post valve closed
3/10/2010	5:30:57 PM	Bubbler valve closed
3/10/2010	5:30:57 PM	Main Vac valve opened
3/10/2010	5:30:57 PM	Bypass valve opened
3/10/2010	5:30:57 PM	Helium MFC set to  0.000000
3/10/2010	5:30:57 PM	H2 MFC set to  0.000000
3/10/2010	5:30:57 PM	BCl3 MFC set to  0.000000
3/10/2010	5:30:57 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:30:57 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:30:57 PM	Tube furnace set to 0
3/10/2010	5:30:58 PM	Run finished at 5:30 PM
3/10/2010	5:32:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	5:32:38 PM	Recipe started at 5:32 PM
3/10/2010	5:32:38 PM	Helium valve closed
3/10/2010	5:32:38 PM	H2 valve closed
3/10/2010	5:32:38 PM	BCl3 valve closed
3/10/2010	5:32:38 PM	PH3 valve closed
3/10/2010	5:32:38 PM	SiCl4 pre valve closed
3/10/2010	5:32:38 PM	SiCl4 post valve closed
3/10/2010	5:32:38 PM	Main Vac valve closed
3/10/2010	5:32:38 PM	Bubbler valve closed
3/10/2010	5:32:38 PM	Bypass valve opened
3/10/2010	5:32:38 PM	Helium MFC set to  0.000000
3/10/2010	5:32:38 PM	H2 MFC set to  0.000000
3/10/2010	5:32:38 PM	BCl3 MFC set to  0.000000
3/10/2010	5:32:38 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:32:38 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:32:38 PM	Tube furnace set to 0
3/10/2010	5:32:38 PM	Helium valve closed
3/10/2010	5:32:38 PM	H2 valve closed
3/10/2010	5:32:38 PM	BCl3 valve closed
3/10/2010	5:32:38 PM	PH3 valve closed
3/10/2010	5:32:38 PM	SiCl4 pre valve closed
3/10/2010	5:32:38 PM	SiCl4 post valve closed
3/10/2010	5:32:38 PM	Bubbler valve closed
3/10/2010	5:32:38 PM	Main Vac valve opened
3/10/2010	5:32:38 PM	Bypass valve opened
3/10/2010	5:32:38 PM	Helium MFC set to  0.000000
3/10/2010	5:32:38 PM	H2 MFC set to  0.000000
3/10/2010	5:32:38 PM	BCl3 MFC set to  0.000000
3/10/2010	5:32:38 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:32:38 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:32:38 PM	Tube furnace set to 0
3/10/2010	5:32:39 PM	Run finished at 5:32 PM
3/10/2010	5:32:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	5:49:43 PM	Main Vac valve closed
3/10/2010	5:49:44 PM	Bypass valve closed
3/10/2010	5:49:56 PM	Bypass valve opened
3/10/2010	5:49:57 PM	Main Vac valve opened
3/10/2010	5:51:05 PM	Recipe started at 5:51 PM
3/10/2010	5:51:05 PM	Helium valve closed
3/10/2010	5:51:05 PM	BCl3 valve closed
3/10/2010	5:51:05 PM	PH3 valve closed
3/10/2010	5:51:05 PM	SiCl4 pre valve closed
3/10/2010	5:51:05 PM	SiCl4 post valve closed
3/10/2010	5:51:05 PM	Main Vac valve closed
3/10/2010	5:51:05 PM	Bypass valve closed
3/10/2010	5:51:05 PM	Bubbler valve closed
3/10/2010	5:51:05 PM	H2 valve opened
3/10/2010	5:51:05 PM	Helium MFC set to  0.000000
3/10/2010	5:51:05 PM	H2 MFC set to  500.000000
3/10/2010	5:51:05 PM	BCl3 MFC set to  0.000000
3/10/2010	5:51:05 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:51:05 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:51:05 PM	Tube furnace set to 0
3/10/2010	5:52:28 PM	Helium valve closed
3/10/2010	5:52:28 PM	BCl3 valve closed
3/10/2010	5:52:28 PM	PH3 valve closed
3/10/2010	5:52:28 PM	SiCl4 pre valve closed
3/10/2010	5:52:28 PM	SiCl4 post valve closed
3/10/2010	5:52:28 PM	Main Vac valve closed
3/10/2010	5:52:28 PM	Bypass valve closed
3/10/2010	5:52:28 PM	H2 valve opened
3/10/2010	5:52:28 PM	Bubbler valve opened
3/10/2010	5:52:28 PM	Helium MFC set to  0.000000
3/10/2010	5:52:28 PM	H2 MFC set to  500.000000
3/10/2010	5:52:28 PM	BCl3 MFC set to  0.000000
3/10/2010	5:52:28 PM	SiCl4 MFC set to  0.000000
3/10/2010	5:52:28 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	5:52:28 PM	Tube furnace set to 0
3/10/2010	6:12:28 PM	Helium valve closed
3/10/2010	6:12:28 PM	BCl3 valve closed
3/10/2010	6:12:28 PM	PH3 valve closed
3/10/2010	6:12:28 PM	Main Vac valve closed
3/10/2010	6:12:28 PM	Bypass valve closed
3/10/2010	6:12:28 PM	H2 valve opened
3/10/2010	6:12:28 PM	SiCl4 pre valve opened
3/10/2010	6:12:28 PM	SiCl4 post valve opened
3/10/2010	6:12:28 PM	Bubbler valve opened
3/10/2010	6:12:28 PM	Helium MFC set to  0.000000
3/10/2010	6:12:28 PM	H2 MFC set to  500.000000
3/10/2010	6:12:28 PM	BCl3 MFC set to  0.000000
3/10/2010	6:12:28 PM	SiCl4 MFC set to  325.000000
3/10/2010	6:12:28 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	6:12:28 PM	Tube furnace set to 0
3/10/2010	6:27:28 PM	Helium valve closed
3/10/2010	6:27:28 PM	BCl3 valve closed
3/10/2010	6:27:28 PM	PH3 valve closed
3/10/2010	6:27:28 PM	SiCl4 pre valve closed
3/10/2010	6:27:28 PM	SiCl4 post valve closed
3/10/2010	6:27:28 PM	Main Vac valve closed
3/10/2010	6:27:28 PM	Bypass valve closed
3/10/2010	6:27:28 PM	H2 valve opened
3/10/2010	6:27:28 PM	Bubbler valve opened
3/10/2010	6:27:28 PM	Helium MFC set to  0.000000
3/10/2010	6:27:28 PM	H2 MFC set to  500.000000
3/10/2010	6:27:28 PM	BCl3 MFC set to  0.000000
3/10/2010	6:27:28 PM	SiCl4 MFC set to  0.000000
3/10/2010	6:27:28 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	6:27:28 PM	Tube furnace set to 0
3/10/2010	6:47:29 PM	H2 valve closed
3/10/2010	6:47:29 PM	BCl3 valve closed
3/10/2010	6:47:29 PM	PH3 valve closed
3/10/2010	6:47:29 PM	SiCl4 pre valve closed
3/10/2010	6:47:29 PM	SiCl4 post valve closed
3/10/2010	6:47:29 PM	Main Vac valve closed
3/10/2010	6:47:29 PM	Bypass valve closed
3/10/2010	6:47:29 PM	Helium valve opened
3/10/2010	6:47:29 PM	Bubbler valve opened
3/10/2010	6:47:29 PM	Helium MFC set to  500.000000
3/10/2010	6:47:29 PM	H2 MFC set to  0.000000
3/10/2010	6:47:29 PM	BCl3 MFC set to  0.000000
3/10/2010	6:47:29 PM	SiCl4 MFC set to  0.000000
3/10/2010	6:47:29 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	6:47:29 PM	Tube furnace set to 0
3/10/2010	7:00:57 PM	Run aborted at 7:00 PM
3/10/2010	7:00:57 PM	Helium valve closed
3/10/2010	7:00:57 PM	H2 valve closed
3/10/2010	7:00:57 PM	BCl3 valve closed
3/10/2010	7:00:57 PM	PH3 valve closed
3/10/2010	7:00:57 PM	SiCl4 pre valve closed
3/10/2010	7:00:57 PM	SiCl4 post valve closed
3/10/2010	7:00:57 PM	Bypass valve closed
3/10/2010	7:00:57 PM	Main Vac valve closed
3/10/2010	7:00:57 PM	Bubbler valve closed
3/10/2010	7:00:57 PM	Helium MFC set to  0.000000
3/10/2010	7:00:57 PM	H2 MFC set to  0.000000
3/10/2010	7:00:57 PM	BCl3 MFC set to  0.000000
3/10/2010	7:00:57 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:00:57 PM	Tube furnace set to 0
3/10/2010	7:16:06 PM	Bubbler valve closed
3/10/2010	7:16:14 PM	Helium valve closed
3/10/2010	7:16:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	7:16:16 PM	Recipe started at 7:16 PM
3/10/2010	7:16:16 PM	Helium valve closed
3/10/2010	7:16:16 PM	H2 valve closed
3/10/2010	7:16:16 PM	BCl3 valve closed
3/10/2010	7:16:16 PM	PH3 valve closed
3/10/2010	7:16:16 PM	SiCl4 pre valve closed
3/10/2010	7:16:16 PM	SiCl4 post valve closed
3/10/2010	7:16:16 PM	Main Vac valve closed
3/10/2010	7:16:16 PM	Bubbler valve closed
3/10/2010	7:16:16 PM	Bypass valve opened
3/10/2010	7:16:16 PM	Helium MFC set to  0.000000
3/10/2010	7:16:16 PM	H2 MFC set to  0.000000
3/10/2010	7:16:16 PM	BCl3 MFC set to  0.000000
3/10/2010	7:16:16 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:16:16 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	7:16:16 PM	Tube furnace set to 0
3/10/2010	7:16:48 PM	Helium valve closed
3/10/2010	7:16:48 PM	H2 valve closed
3/10/2010	7:16:48 PM	BCl3 valve closed
3/10/2010	7:16:48 PM	PH3 valve closed
3/10/2010	7:16:48 PM	SiCl4 pre valve closed
3/10/2010	7:16:48 PM	SiCl4 post valve closed
3/10/2010	7:16:48 PM	Bubbler valve closed
3/10/2010	7:16:48 PM	Main Vac valve opened
3/10/2010	7:16:48 PM	Bypass valve opened
3/10/2010	7:16:48 PM	Helium MFC set to  0.000000
3/10/2010	7:16:48 PM	H2 MFC set to  0.000000
3/10/2010	7:16:48 PM	BCl3 MFC set to  0.000000
3/10/2010	7:16:48 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:16:48 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	7:16:48 PM	Tube furnace set to 0
3/10/2010	7:16:48 PM	Run finished at 7:16 PM
3/10/2010	7:16:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	7:21:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	7:21:36 PM	Recipe started at 7:21 PM
3/10/2010	7:21:36 PM	Helium valve closed
3/10/2010	7:21:36 PM	H2 valve closed
3/10/2010	7:21:36 PM	BCl3 valve closed
3/10/2010	7:21:36 PM	PH3 valve closed
3/10/2010	7:21:36 PM	SiCl4 pre valve closed
3/10/2010	7:21:36 PM	SiCl4 post valve closed
3/10/2010	7:21:36 PM	Main Vac valve closed
3/10/2010	7:21:36 PM	Bubbler valve closed
3/10/2010	7:21:36 PM	Bypass valve opened
3/10/2010	7:21:36 PM	Helium MFC set to  0.000000
3/10/2010	7:21:36 PM	H2 MFC set to  0.000000
3/10/2010	7:21:36 PM	BCl3 MFC set to  0.000000
3/10/2010	7:21:36 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:21:36 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	7:21:36 PM	Tube furnace set to 0
3/10/2010	7:21:36 PM	Helium valve closed
3/10/2010	7:21:36 PM	H2 valve closed
3/10/2010	7:21:36 PM	BCl3 valve closed
3/10/2010	7:21:36 PM	PH3 valve closed
3/10/2010	7:21:36 PM	SiCl4 pre valve closed
3/10/2010	7:21:36 PM	SiCl4 post valve closed
3/10/2010	7:21:36 PM	Bubbler valve closed
3/10/2010	7:21:36 PM	Main Vac valve opened
3/10/2010	7:21:36 PM	Bypass valve opened
3/10/2010	7:21:36 PM	Helium MFC set to  0.000000
3/10/2010	7:21:36 PM	H2 MFC set to  0.000000
3/10/2010	7:21:36 PM	BCl3 MFC set to  0.000000
3/10/2010	7:21:36 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:21:36 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	7:21:36 PM	Tube furnace set to 0
3/10/2010	7:21:36 PM	Run finished at 7:21 PM
3/10/2010	7:21:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	7:22:09 PM	Recipe started at 7:22 PM
3/10/2010	7:22:09 PM	H2 valve closed
3/10/2010	7:22:09 PM	BCl3 valve closed
3/10/2010	7:22:09 PM	PH3 valve closed
3/10/2010	7:22:09 PM	SiCl4 pre valve closed
3/10/2010	7:22:09 PM	SiCl4 post valve closed
3/10/2010	7:22:09 PM	Main Vac valve closed
3/10/2010	7:22:09 PM	Bypass valve closed
3/10/2010	7:22:09 PM	Bubbler valve closed
3/10/2010	7:22:09 PM	Helium valve opened
3/10/2010	7:22:09 PM	Helium MFC set to  500.000000
3/10/2010	7:22:09 PM	H2 MFC set to  0.000000
3/10/2010	7:22:09 PM	BCl3 MFC set to  0.000000
3/10/2010	7:22:09 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:22:09 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	7:22:09 PM	Tube furnace set to 0
3/10/2010	7:23:30 PM	Helium valve closed
3/10/2010	7:23:30 PM	H2 valve closed
3/10/2010	7:23:30 PM	BCl3 valve closed
3/10/2010	7:23:30 PM	PH3 valve closed
3/10/2010	7:23:30 PM	SiCl4 pre valve closed
3/10/2010	7:23:30 PM	SiCl4 post valve closed
3/10/2010	7:23:30 PM	Main Vac valve closed
3/10/2010	7:23:30 PM	Bypass valve closed
3/10/2010	7:23:30 PM	Bubbler valve closed
3/10/2010	7:23:30 PM	Helium MFC set to  0.000000
3/10/2010	7:23:30 PM	H2 MFC set to  0.000000
3/10/2010	7:23:30 PM	BCl3 MFC set to  0.000000
3/10/2010	7:23:30 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:23:30 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	7:23:30 PM	Tube furnace set to 0
3/10/2010	7:23:45 PM	Helium valve closed
3/10/2010	7:23:45 PM	H2 valve closed
3/10/2010	7:23:45 PM	BCl3 valve closed
3/10/2010	7:23:45 PM	PH3 valve closed
3/10/2010	7:23:45 PM	SiCl4 pre valve closed
3/10/2010	7:23:45 PM	SiCl4 post valve closed
3/10/2010	7:23:45 PM	Main Vac valve closed
3/10/2010	7:23:45 PM	Bubbler valve closed
3/10/2010	7:23:45 PM	Bypass valve opened
3/10/2010	7:23:45 PM	Helium MFC set to  0.000000
3/10/2010	7:23:45 PM	H2 MFC set to  0.000000
3/10/2010	7:23:45 PM	BCl3 MFC set to  0.000000
3/10/2010	7:23:45 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:23:45 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	7:23:45 PM	Tube furnace set to 0
3/10/2010	7:24:07 PM	Helium valve closed
3/10/2010	7:24:07 PM	H2 valve closed
3/10/2010	7:24:07 PM	BCl3 valve closed
3/10/2010	7:24:07 PM	PH3 valve closed
3/10/2010	7:24:07 PM	SiCl4 pre valve closed
3/10/2010	7:24:07 PM	SiCl4 post valve closed
3/10/2010	7:24:07 PM	Bubbler valve closed
3/10/2010	7:24:07 PM	Main Vac valve opened
3/10/2010	7:24:07 PM	Bypass valve opened
3/10/2010	7:24:07 PM	Helium MFC set to  0.000000
3/10/2010	7:24:07 PM	H2 MFC set to  0.000000
3/10/2010	7:24:07 PM	BCl3 MFC set to  0.000000
3/10/2010	7:24:07 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:24:07 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	7:24:07 PM	Tube furnace set to 0
3/10/2010	7:29:07 PM	H2 valve closed
3/10/2010	7:29:07 PM	BCl3 valve closed
3/10/2010	7:29:07 PM	PH3 valve closed
3/10/2010	7:29:07 PM	SiCl4 pre valve closed
3/10/2010	7:29:07 PM	SiCl4 post valve closed
3/10/2010	7:29:07 PM	Main Vac valve closed
3/10/2010	7:29:07 PM	Bypass valve closed
3/10/2010	7:29:07 PM	Bubbler valve closed
3/10/2010	7:29:07 PM	Helium valve opened
3/10/2010	7:29:07 PM	Helium MFC set to  500.000000
3/10/2010	7:29:07 PM	H2 MFC set to  0.000000
3/10/2010	7:29:07 PM	BCl3 MFC set to  0.000000
3/10/2010	7:29:07 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:29:07 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	7:29:07 PM	Tube furnace set to 0
3/10/2010	7:30:27 PM	Helium valve closed
3/10/2010	7:30:27 PM	H2 valve closed
3/10/2010	7:30:27 PM	BCl3 valve closed
3/10/2010	7:30:27 PM	PH3 valve closed
3/10/2010	7:30:27 PM	SiCl4 pre valve closed
3/10/2010	7:30:27 PM	SiCl4 post valve closed
3/10/2010	7:30:27 PM	Main Vac valve closed
3/10/2010	7:30:27 PM	Bypass valve closed
3/10/2010	7:30:27 PM	Bubbler valve closed
3/10/2010	7:30:27 PM	Helium MFC set to  0.000000
3/10/2010	7:30:27 PM	H2 MFC set to  0.000000
3/10/2010	7:30:27 PM	BCl3 MFC set to  0.000000
3/10/2010	7:30:27 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:30:27 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	7:30:27 PM	Tube furnace set to 0
3/10/2010	7:30:42 PM	Helium valve closed
3/10/2010	7:30:42 PM	H2 valve closed
3/10/2010	7:30:42 PM	BCl3 valve closed
3/10/2010	7:30:42 PM	PH3 valve closed
3/10/2010	7:30:42 PM	SiCl4 pre valve closed
3/10/2010	7:30:42 PM	SiCl4 post valve closed
3/10/2010	7:30:42 PM	Main Vac valve closed
3/10/2010	7:30:42 PM	Bubbler valve closed
3/10/2010	7:30:42 PM	Bypass valve opened
3/10/2010	7:30:42 PM	Helium MFC set to  0.000000
3/10/2010	7:30:42 PM	H2 MFC set to  0.000000
3/10/2010	7:30:42 PM	BCl3 MFC set to  0.000000
3/10/2010	7:30:42 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:30:42 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	7:30:42 PM	Tube furnace set to 0
3/10/2010	7:31:03 PM	Helium valve closed
3/10/2010	7:31:03 PM	H2 valve closed
3/10/2010	7:31:03 PM	BCl3 valve closed
3/10/2010	7:31:03 PM	PH3 valve closed
3/10/2010	7:31:03 PM	SiCl4 pre valve closed
3/10/2010	7:31:03 PM	SiCl4 post valve closed
3/10/2010	7:31:03 PM	Bubbler valve closed
3/10/2010	7:31:03 PM	Main Vac valve opened
3/10/2010	7:31:03 PM	Bypass valve opened
3/10/2010	7:31:03 PM	Helium MFC set to  0.000000
3/10/2010	7:31:03 PM	H2 MFC set to  0.000000
3/10/2010	7:31:03 PM	BCl3 MFC set to  0.000000
3/10/2010	7:31:03 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:31:03 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	7:31:03 PM	Tube furnace set to 0
3/10/2010	7:36:04 PM	H2 valve closed
3/10/2010	7:36:04 PM	BCl3 valve closed
3/10/2010	7:36:04 PM	PH3 valve closed
3/10/2010	7:36:04 PM	SiCl4 pre valve closed
3/10/2010	7:36:04 PM	SiCl4 post valve closed
3/10/2010	7:36:04 PM	Main Vac valve closed
3/10/2010	7:36:04 PM	Bypass valve closed
3/10/2010	7:36:04 PM	Bubbler valve closed
3/10/2010	7:36:04 PM	Helium valve opened
3/10/2010	7:36:04 PM	Helium MFC set to  500.000000
3/10/2010	7:36:04 PM	H2 MFC set to  0.000000
3/10/2010	7:36:04 PM	BCl3 MFC set to  0.000000
3/10/2010	7:36:04 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:36:04 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	7:36:04 PM	Tube furnace set to 0
3/10/2010	7:37:23 PM	Helium valve closed
3/10/2010	7:37:23 PM	H2 valve closed
3/10/2010	7:37:23 PM	BCl3 valve closed
3/10/2010	7:37:23 PM	PH3 valve closed
3/10/2010	7:37:23 PM	SiCl4 pre valve closed
3/10/2010	7:37:23 PM	SiCl4 post valve closed
3/10/2010	7:37:23 PM	Main Vac valve closed
3/10/2010	7:37:23 PM	Bypass valve closed
3/10/2010	7:37:23 PM	Bubbler valve closed
3/10/2010	7:37:23 PM	Helium MFC set to  0.000000
3/10/2010	7:37:23 PM	H2 MFC set to  0.000000
3/10/2010	7:37:23 PM	BCl3 MFC set to  0.000000
3/10/2010	7:37:23 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:37:23 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	7:37:23 PM	Tube furnace set to 0
3/10/2010	7:37:38 PM	Helium valve closed
3/10/2010	7:37:38 PM	H2 valve closed
3/10/2010	7:37:38 PM	BCl3 valve closed
3/10/2010	7:37:38 PM	PH3 valve closed
3/10/2010	7:37:38 PM	SiCl4 pre valve closed
3/10/2010	7:37:38 PM	SiCl4 post valve closed
3/10/2010	7:37:38 PM	Main Vac valve closed
3/10/2010	7:37:38 PM	Bubbler valve closed
3/10/2010	7:37:38 PM	Bypass valve opened
3/10/2010	7:37:38 PM	Helium MFC set to  0.000000
3/10/2010	7:37:38 PM	H2 MFC set to  0.000000
3/10/2010	7:37:38 PM	BCl3 MFC set to  0.000000
3/10/2010	7:37:38 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:37:38 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	7:37:38 PM	Tube furnace set to 0
3/10/2010	7:37:59 PM	Helium valve closed
3/10/2010	7:37:59 PM	H2 valve closed
3/10/2010	7:37:59 PM	BCl3 valve closed
3/10/2010	7:37:59 PM	PH3 valve closed
3/10/2010	7:37:59 PM	SiCl4 pre valve closed
3/10/2010	7:37:59 PM	SiCl4 post valve closed
3/10/2010	7:37:59 PM	Bubbler valve closed
3/10/2010	7:37:59 PM	Main Vac valve opened
3/10/2010	7:37:59 PM	Bypass valve opened
3/10/2010	7:37:59 PM	Helium MFC set to  0.000000
3/10/2010	7:37:59 PM	H2 MFC set to  0.000000
3/10/2010	7:37:59 PM	BCl3 MFC set to  0.000000
3/10/2010	7:37:59 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:37:59 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	7:37:59 PM	Tube furnace set to 0
3/10/2010	7:43:00 PM	Helium valve closed
3/10/2010	7:43:00 PM	H2 valve closed
3/10/2010	7:43:00 PM	BCl3 valve closed
3/10/2010	7:43:00 PM	PH3 valve closed
3/10/2010	7:43:00 PM	SiCl4 pre valve closed
3/10/2010	7:43:00 PM	SiCl4 post valve closed
3/10/2010	7:43:00 PM	Bubbler valve closed
3/10/2010	7:43:00 PM	Main Vac valve opened
3/10/2010	7:43:00 PM	Bypass valve opened
3/10/2010	7:43:00 PM	Helium MFC set to  0.000000
3/10/2010	7:43:00 PM	H2 MFC set to  0.000000
3/10/2010	7:43:00 PM	BCl3 MFC set to  0.000000
3/10/2010	7:43:00 PM	SiCl4 MFC set to  0.000000
3/10/2010	7:43:00 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	7:43:00 PM	Tube furnace set to 0
3/10/2010	7:43:01 PM	Run finished at 7:43 PM
3/10/2010	9:06:55 PM	Main Vac valve closed
3/10/2010	9:06:59 PM	Bypass valve closed
3/10/2010	9:07:20 PM	Bypass valve opened
3/10/2010	9:07:21 PM	Main Vac valve opened
3/10/2010	9:10:48 PM	Recipe started at 9:10 PM
3/10/2010	9:10:48 PM	Helium valve closed
3/10/2010	9:10:48 PM	BCl3 valve closed
3/10/2010	9:10:48 PM	PH3 valve closed
3/10/2010	9:10:48 PM	SiCl4 pre valve closed
3/10/2010	9:10:48 PM	SiCl4 post valve closed
3/10/2010	9:10:48 PM	Main Vac valve closed
3/10/2010	9:10:48 PM	Bypass valve closed
3/10/2010	9:10:48 PM	Bubbler valve closed
3/10/2010	9:10:48 PM	H2 valve opened
3/10/2010	9:10:48 PM	Helium MFC set to  0.000000
3/10/2010	9:10:48 PM	H2 MFC set to  500.000000
3/10/2010	9:10:48 PM	BCl3 MFC set to  0.000000
3/10/2010	9:10:48 PM	SiCl4 MFC set to  0.000000
3/10/2010	9:10:48 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	9:10:48 PM	Tube furnace set to 0
3/10/2010	9:12:08 PM	Helium valve closed
3/10/2010	9:12:08 PM	BCl3 valve closed
3/10/2010	9:12:08 PM	PH3 valve closed
3/10/2010	9:12:08 PM	SiCl4 pre valve closed
3/10/2010	9:12:08 PM	SiCl4 post valve closed
3/10/2010	9:12:08 PM	Main Vac valve closed
3/10/2010	9:12:08 PM	Bypass valve closed
3/10/2010	9:12:08 PM	H2 valve opened
3/10/2010	9:12:08 PM	Bubbler valve opened
3/10/2010	9:12:08 PM	Helium MFC set to  0.000000
3/10/2010	9:12:08 PM	H2 MFC set to  500.000000
3/10/2010	9:12:08 PM	BCl3 MFC set to  0.000000
3/10/2010	9:12:08 PM	SiCl4 MFC set to  0.000000
3/10/2010	9:12:08 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	9:12:08 PM	Tube furnace set to 0
3/10/2010	9:32:08 PM	Helium valve closed
3/10/2010	9:32:08 PM	BCl3 valve closed
3/10/2010	9:32:08 PM	PH3 valve closed
3/10/2010	9:32:08 PM	Main Vac valve closed
3/10/2010	9:32:08 PM	Bypass valve closed
3/10/2010	9:32:08 PM	H2 valve opened
3/10/2010	9:32:08 PM	SiCl4 pre valve opened
3/10/2010	9:32:08 PM	SiCl4 post valve opened
3/10/2010	9:32:08 PM	Bubbler valve opened
3/10/2010	9:32:08 PM	Helium MFC set to  0.000000
3/10/2010	9:32:08 PM	H2 MFC set to  500.000000
3/10/2010	9:32:08 PM	BCl3 MFC set to  0.000000
3/10/2010	9:32:08 PM	SiCl4 MFC set to  325.000000
3/10/2010	9:32:08 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	9:32:08 PM	Tube furnace set to 0
3/10/2010	9:47:08 PM	Helium valve closed
3/10/2010	9:47:08 PM	BCl3 valve closed
3/10/2010	9:47:08 PM	PH3 valve closed
3/10/2010	9:47:08 PM	SiCl4 pre valve closed
3/10/2010	9:47:08 PM	SiCl4 post valve closed
3/10/2010	9:47:08 PM	Main Vac valve closed
3/10/2010	9:47:08 PM	Bypass valve closed
3/10/2010	9:47:08 PM	H2 valve opened
3/10/2010	9:47:08 PM	Bubbler valve opened
3/10/2010	9:47:08 PM	Helium MFC set to  0.000000
3/10/2010	9:47:08 PM	H2 MFC set to  500.000000
3/10/2010	9:47:08 PM	BCl3 MFC set to  0.000000
3/10/2010	9:47:08 PM	SiCl4 MFC set to  0.000000
3/10/2010	9:47:08 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	9:47:08 PM	Tube furnace set to 0
3/10/2010	10:07:09 PM	H2 valve closed
3/10/2010	10:07:09 PM	BCl3 valve closed
3/10/2010	10:07:09 PM	PH3 valve closed
3/10/2010	10:07:09 PM	SiCl4 pre valve closed
3/10/2010	10:07:09 PM	SiCl4 post valve closed
3/10/2010	10:07:09 PM	Main Vac valve closed
3/10/2010	10:07:09 PM	Bypass valve closed
3/10/2010	10:07:09 PM	Helium valve opened
3/10/2010	10:07:09 PM	Bubbler valve opened
3/10/2010	10:07:09 PM	Helium MFC set to  500.000000
3/10/2010	10:07:09 PM	H2 MFC set to  0.000000
3/10/2010	10:07:09 PM	BCl3 MFC set to  0.000000
3/10/2010	10:07:09 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:07:09 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:07:09 PM	Tube furnace set to 0
3/10/2010	10:16:37 PM	Run aborted at 10:16 PM
3/10/2010	10:16:37 PM	Helium valve closed
3/10/2010	10:16:37 PM	H2 valve closed
3/10/2010	10:16:37 PM	BCl3 valve closed
3/10/2010	10:16:37 PM	PH3 valve closed
3/10/2010	10:16:37 PM	SiCl4 pre valve closed
3/10/2010	10:16:37 PM	SiCl4 post valve closed
3/10/2010	10:16:37 PM	Bypass valve closed
3/10/2010	10:16:37 PM	Main Vac valve closed
3/10/2010	10:16:37 PM	Bubbler valve closed
3/10/2010	10:16:37 PM	Helium MFC set to  0.000000
3/10/2010	10:16:37 PM	H2 MFC set to  0.000000
3/10/2010	10:16:37 PM	BCl3 MFC set to  0.000000
3/10/2010	10:16:37 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:16:37 PM	Tube furnace set to 0
3/10/2010	10:29:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	10:29:07 PM	Recipe started at 10:29 PM
3/10/2010	10:29:07 PM	Helium valve closed
3/10/2010	10:29:07 PM	H2 valve closed
3/10/2010	10:29:07 PM	BCl3 valve closed
3/10/2010	10:29:07 PM	PH3 valve closed
3/10/2010	10:29:07 PM	SiCl4 pre valve closed
3/10/2010	10:29:07 PM	SiCl4 post valve closed
3/10/2010	10:29:07 PM	Main Vac valve closed
3/10/2010	10:29:07 PM	Bubbler valve closed
3/10/2010	10:29:07 PM	Bypass valve opened
3/10/2010	10:29:07 PM	Helium MFC set to  0.000000
3/10/2010	10:29:07 PM	H2 MFC set to  0.000000
3/10/2010	10:29:07 PM	BCl3 MFC set to  0.000000
3/10/2010	10:29:07 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:29:07 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:29:07 PM	Tube furnace set to 0
3/10/2010	10:29:38 PM	Helium valve closed
3/10/2010	10:29:38 PM	H2 valve closed
3/10/2010	10:29:38 PM	BCl3 valve closed
3/10/2010	10:29:38 PM	PH3 valve closed
3/10/2010	10:29:38 PM	SiCl4 pre valve closed
3/10/2010	10:29:38 PM	SiCl4 post valve closed
3/10/2010	10:29:38 PM	Bubbler valve closed
3/10/2010	10:29:38 PM	Main Vac valve opened
3/10/2010	10:29:38 PM	Bypass valve opened
3/10/2010	10:29:38 PM	Helium MFC set to  0.000000
3/10/2010	10:29:38 PM	H2 MFC set to  0.000000
3/10/2010	10:29:38 PM	BCl3 MFC set to  0.000000
3/10/2010	10:29:38 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:29:38 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:29:38 PM	Tube furnace set to 0
3/10/2010	10:29:38 PM	Run finished at 10:29 PM
3/10/2010	10:29:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2010	10:31:24 PM	Recipe started at 10:31 PM
3/10/2010	10:31:24 PM	H2 valve closed
3/10/2010	10:31:24 PM	BCl3 valve closed
3/10/2010	10:31:24 PM	PH3 valve closed
3/10/2010	10:31:24 PM	SiCl4 pre valve closed
3/10/2010	10:31:24 PM	SiCl4 post valve closed
3/10/2010	10:31:24 PM	Main Vac valve closed
3/10/2010	10:31:24 PM	Bypass valve closed
3/10/2010	10:31:24 PM	Bubbler valve closed
3/10/2010	10:31:24 PM	Helium valve opened
3/10/2010	10:31:24 PM	Helium MFC set to  500.000000
3/10/2010	10:31:24 PM	H2 MFC set to  0.000000
3/10/2010	10:31:24 PM	BCl3 MFC set to  0.000000
3/10/2010	10:31:24 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:31:24 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:31:24 PM	Tube furnace set to 0
3/10/2010	10:32:44 PM	Helium valve closed
3/10/2010	10:32:44 PM	H2 valve closed
3/10/2010	10:32:44 PM	BCl3 valve closed
3/10/2010	10:32:44 PM	PH3 valve closed
3/10/2010	10:32:44 PM	SiCl4 pre valve closed
3/10/2010	10:32:44 PM	SiCl4 post valve closed
3/10/2010	10:32:44 PM	Main Vac valve closed
3/10/2010	10:32:44 PM	Bypass valve closed
3/10/2010	10:32:44 PM	Bubbler valve closed
3/10/2010	10:32:44 PM	Helium MFC set to  0.000000
3/10/2010	10:32:44 PM	H2 MFC set to  0.000000
3/10/2010	10:32:44 PM	BCl3 MFC set to  0.000000
3/10/2010	10:32:45 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:32:45 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:32:45 PM	Tube furnace set to 0
3/10/2010	10:33:00 PM	Helium valve closed
3/10/2010	10:33:00 PM	H2 valve closed
3/10/2010	10:33:00 PM	BCl3 valve closed
3/10/2010	10:33:00 PM	PH3 valve closed
3/10/2010	10:33:00 PM	SiCl4 pre valve closed
3/10/2010	10:33:00 PM	SiCl4 post valve closed
3/10/2010	10:33:00 PM	Main Vac valve closed
3/10/2010	10:33:00 PM	Bubbler valve closed
3/10/2010	10:33:00 PM	Bypass valve opened
3/10/2010	10:33:00 PM	Helium MFC set to  0.000000
3/10/2010	10:33:00 PM	H2 MFC set to  0.000000
3/10/2010	10:33:00 PM	BCl3 MFC set to  0.000000
3/10/2010	10:33:00 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:33:00 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:33:00 PM	Tube furnace set to 0
3/10/2010	10:33:21 PM	Helium valve closed
3/10/2010	10:33:21 PM	H2 valve closed
3/10/2010	10:33:21 PM	BCl3 valve closed
3/10/2010	10:33:21 PM	PH3 valve closed
3/10/2010	10:33:21 PM	SiCl4 pre valve closed
3/10/2010	10:33:21 PM	SiCl4 post valve closed
3/10/2010	10:33:21 PM	Bubbler valve closed
3/10/2010	10:33:21 PM	Main Vac valve opened
3/10/2010	10:33:21 PM	Bypass valve opened
3/10/2010	10:33:21 PM	Helium MFC set to  0.000000
3/10/2010	10:33:21 PM	H2 MFC set to  0.000000
3/10/2010	10:33:21 PM	BCl3 MFC set to  0.000000
3/10/2010	10:33:21 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:33:21 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:33:21 PM	Tube furnace set to 0
3/10/2010	10:38:22 PM	H2 valve closed
3/10/2010	10:38:22 PM	BCl3 valve closed
3/10/2010	10:38:22 PM	PH3 valve closed
3/10/2010	10:38:22 PM	SiCl4 pre valve closed
3/10/2010	10:38:22 PM	SiCl4 post valve closed
3/10/2010	10:38:22 PM	Main Vac valve closed
3/10/2010	10:38:22 PM	Bypass valve closed
3/10/2010	10:38:22 PM	Bubbler valve closed
3/10/2010	10:38:22 PM	Helium valve opened
3/10/2010	10:38:22 PM	Helium MFC set to  500.000000
3/10/2010	10:38:22 PM	H2 MFC set to  0.000000
3/10/2010	10:38:22 PM	BCl3 MFC set to  0.000000
3/10/2010	10:38:22 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:38:22 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:38:22 PM	Tube furnace set to 0
3/10/2010	10:39:43 PM	Helium valve closed
3/10/2010	10:39:43 PM	H2 valve closed
3/10/2010	10:39:43 PM	BCl3 valve closed
3/10/2010	10:39:43 PM	PH3 valve closed
3/10/2010	10:39:43 PM	SiCl4 pre valve closed
3/10/2010	10:39:43 PM	SiCl4 post valve closed
3/10/2010	10:39:43 PM	Main Vac valve closed
3/10/2010	10:39:43 PM	Bypass valve closed
3/10/2010	10:39:43 PM	Bubbler valve closed
3/10/2010	10:39:43 PM	Helium MFC set to  0.000000
3/10/2010	10:39:43 PM	H2 MFC set to  0.000000
3/10/2010	10:39:43 PM	BCl3 MFC set to  0.000000
3/10/2010	10:39:43 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:39:43 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:39:43 PM	Tube furnace set to 0
3/10/2010	10:39:58 PM	Helium valve closed
3/10/2010	10:39:58 PM	H2 valve closed
3/10/2010	10:39:58 PM	BCl3 valve closed
3/10/2010	10:39:58 PM	PH3 valve closed
3/10/2010	10:39:58 PM	SiCl4 pre valve closed
3/10/2010	10:39:58 PM	SiCl4 post valve closed
3/10/2010	10:39:58 PM	Main Vac valve closed
3/10/2010	10:39:58 PM	Bubbler valve closed
3/10/2010	10:39:58 PM	Bypass valve opened
3/10/2010	10:39:58 PM	Helium MFC set to  0.000000
3/10/2010	10:39:58 PM	H2 MFC set to  0.000000
3/10/2010	10:39:58 PM	BCl3 MFC set to  0.000000
3/10/2010	10:39:58 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:39:58 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:39:58 PM	Tube furnace set to 0
3/10/2010	10:40:20 PM	Helium valve closed
3/10/2010	10:40:20 PM	H2 valve closed
3/10/2010	10:40:20 PM	BCl3 valve closed
3/10/2010	10:40:20 PM	PH3 valve closed
3/10/2010	10:40:20 PM	SiCl4 pre valve closed
3/10/2010	10:40:20 PM	SiCl4 post valve closed
3/10/2010	10:40:20 PM	Bubbler valve closed
3/10/2010	10:40:20 PM	Main Vac valve opened
3/10/2010	10:40:20 PM	Bypass valve opened
3/10/2010	10:40:20 PM	Helium MFC set to  0.000000
3/10/2010	10:40:20 PM	H2 MFC set to  0.000000
3/10/2010	10:40:20 PM	BCl3 MFC set to  0.000000
3/10/2010	10:40:20 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:40:20 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:40:20 PM	Tube furnace set to 0
3/10/2010	10:45:20 PM	H2 valve closed
3/10/2010	10:45:20 PM	BCl3 valve closed
3/10/2010	10:45:20 PM	PH3 valve closed
3/10/2010	10:45:20 PM	SiCl4 pre valve closed
3/10/2010	10:45:20 PM	SiCl4 post valve closed
3/10/2010	10:45:20 PM	Main Vac valve closed
3/10/2010	10:45:20 PM	Bypass valve closed
3/10/2010	10:45:20 PM	Bubbler valve closed
3/10/2010	10:45:20 PM	Helium valve opened
3/10/2010	10:45:20 PM	Helium MFC set to  500.000000
3/10/2010	10:45:20 PM	H2 MFC set to  0.000000
3/10/2010	10:45:20 PM	BCl3 MFC set to  0.000000
3/10/2010	10:45:20 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:45:20 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:45:20 PM	Tube furnace set to 0
3/10/2010	10:46:42 PM	Helium valve closed
3/10/2010	10:46:42 PM	H2 valve closed
3/10/2010	10:46:42 PM	BCl3 valve closed
3/10/2010	10:46:42 PM	PH3 valve closed
3/10/2010	10:46:42 PM	SiCl4 pre valve closed
3/10/2010	10:46:42 PM	SiCl4 post valve closed
3/10/2010	10:46:42 PM	Main Vac valve closed
3/10/2010	10:46:42 PM	Bypass valve closed
3/10/2010	10:46:42 PM	Bubbler valve closed
3/10/2010	10:46:42 PM	Helium MFC set to  0.000000
3/10/2010	10:46:42 PM	H2 MFC set to  0.000000
3/10/2010	10:46:42 PM	BCl3 MFC set to  0.000000
3/10/2010	10:46:42 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:46:42 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:46:42 PM	Tube furnace set to 0
3/10/2010	10:46:57 PM	Helium valve closed
3/10/2010	10:46:57 PM	H2 valve closed
3/10/2010	10:46:57 PM	BCl3 valve closed
3/10/2010	10:46:57 PM	PH3 valve closed
3/10/2010	10:46:57 PM	SiCl4 pre valve closed
3/10/2010	10:46:57 PM	SiCl4 post valve closed
3/10/2010	10:46:57 PM	Main Vac valve closed
3/10/2010	10:46:57 PM	Bubbler valve closed
3/10/2010	10:46:57 PM	Bypass valve opened
3/10/2010	10:46:57 PM	Helium MFC set to  0.000000
3/10/2010	10:46:57 PM	H2 MFC set to  0.000000
3/10/2010	10:46:57 PM	BCl3 MFC set to  0.000000
3/10/2010	10:46:57 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:46:57 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:46:57 PM	Tube furnace set to 0
3/10/2010	10:47:19 PM	Helium valve closed
3/10/2010	10:47:19 PM	H2 valve closed
3/10/2010	10:47:19 PM	BCl3 valve closed
3/10/2010	10:47:19 PM	PH3 valve closed
3/10/2010	10:47:19 PM	SiCl4 pre valve closed
3/10/2010	10:47:19 PM	SiCl4 post valve closed
3/10/2010	10:47:19 PM	Bubbler valve closed
3/10/2010	10:47:19 PM	Main Vac valve opened
3/10/2010	10:47:19 PM	Bypass valve opened
3/10/2010	10:47:19 PM	Helium MFC set to  0.000000
3/10/2010	10:47:19 PM	H2 MFC set to  0.000000
3/10/2010	10:47:19 PM	BCl3 MFC set to  0.000000
3/10/2010	10:47:19 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:47:19 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:47:19 PM	Tube furnace set to 0
3/10/2010	10:52:19 PM	Helium valve closed
3/10/2010	10:52:19 PM	H2 valve closed
3/10/2010	10:52:19 PM	BCl3 valve closed
3/10/2010	10:52:19 PM	PH3 valve closed
3/10/2010	10:52:19 PM	SiCl4 pre valve closed
3/10/2010	10:52:20 PM	SiCl4 post valve closed
3/10/2010	10:52:20 PM	Bubbler valve closed
3/10/2010	10:52:20 PM	Main Vac valve opened
3/10/2010	10:52:20 PM	Bypass valve opened
3/10/2010	10:52:20 PM	Helium MFC set to  0.000000
3/10/2010	10:52:20 PM	H2 MFC set to  0.000000
3/10/2010	10:52:20 PM	BCl3 MFC set to  0.000000
3/10/2010	10:52:20 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:52:20 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:52:20 PM	Tube furnace set to 0
3/10/2010	10:52:21 PM	Run finished at 10:52 PM
3/10/2010	10:57:16 PM	Main Vac valve closed
3/10/2010	10:57:19 PM	Bypass valve closed
3/10/2010	10:57:35 PM	Bypass valve opened
3/10/2010	10:57:36 PM	Main Vac valve opened
3/10/2010	10:58:35 PM	Recipe started at 10:58 PM
3/10/2010	10:58:35 PM	Helium valve closed
3/10/2010	10:58:35 PM	BCl3 valve closed
3/10/2010	10:58:35 PM	PH3 valve closed
3/10/2010	10:58:35 PM	SiCl4 pre valve closed
3/10/2010	10:58:35 PM	SiCl4 post valve closed
3/10/2010	10:58:35 PM	Main Vac valve closed
3/10/2010	10:58:35 PM	Bypass valve closed
3/10/2010	10:58:35 PM	Bubbler valve closed
3/10/2010	10:58:35 PM	H2 valve opened
3/10/2010	10:58:35 PM	Helium MFC set to  0.000000
3/10/2010	10:58:35 PM	H2 MFC set to  500.000000
3/10/2010	10:58:35 PM	BCl3 MFC set to  0.000000
3/10/2010	10:58:35 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:58:35 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:58:35 PM	Tube furnace set to 0
3/10/2010	10:59:56 PM	Helium valve closed
3/10/2010	10:59:56 PM	BCl3 valve closed
3/10/2010	10:59:56 PM	PH3 valve closed
3/10/2010	10:59:56 PM	SiCl4 pre valve closed
3/10/2010	10:59:56 PM	SiCl4 post valve closed
3/10/2010	10:59:56 PM	Main Vac valve closed
3/10/2010	10:59:56 PM	Bypass valve closed
3/10/2010	10:59:56 PM	H2 valve opened
3/10/2010	10:59:56 PM	Bubbler valve opened
3/10/2010	10:59:56 PM	Helium MFC set to  0.000000
3/10/2010	10:59:56 PM	H2 MFC set to  500.000000
3/10/2010	10:59:56 PM	BCl3 MFC set to  0.000000
3/10/2010	10:59:56 PM	SiCl4 MFC set to  0.000000
3/10/2010	10:59:56 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	10:59:56 PM	Tube furnace set to 0
3/10/2010	11:19:56 PM	Helium valve closed
3/10/2010	11:19:56 PM	BCl3 valve closed
3/10/2010	11:19:56 PM	PH3 valve closed
3/10/2010	11:19:56 PM	Main Vac valve closed
3/10/2010	11:19:56 PM	Bypass valve closed
3/10/2010	11:19:56 PM	H2 valve opened
3/10/2010	11:19:56 PM	SiCl4 pre valve opened
3/10/2010	11:19:56 PM	SiCl4 post valve opened
3/10/2010	11:19:56 PM	Bubbler valve opened
3/10/2010	11:19:56 PM	Helium MFC set to  0.000000
3/10/2010	11:19:56 PM	H2 MFC set to  500.000000
3/10/2010	11:19:56 PM	BCl3 MFC set to  0.000000
3/10/2010	11:19:56 PM	SiCl4 MFC set to  325.000000
3/10/2010	11:19:56 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:19:56 PM	Tube furnace set to 0
3/10/2010	11:34:56 PM	Helium valve closed
3/10/2010	11:34:56 PM	BCl3 valve closed
3/10/2010	11:34:56 PM	PH3 valve closed
3/10/2010	11:34:56 PM	SiCl4 pre valve closed
3/10/2010	11:34:56 PM	SiCl4 post valve closed
3/10/2010	11:34:56 PM	Main Vac valve closed
3/10/2010	11:34:56 PM	Bypass valve closed
3/10/2010	11:34:56 PM	H2 valve opened
3/10/2010	11:34:56 PM	Bubbler valve opened
3/10/2010	11:34:56 PM	Helium MFC set to  0.000000
3/10/2010	11:34:56 PM	H2 MFC set to  500.000000
3/10/2010	11:34:56 PM	BCl3 MFC set to  0.000000
3/10/2010	11:34:56 PM	SiCl4 MFC set to  0.000000
3/10/2010	11:34:56 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:34:56 PM	Tube furnace set to 0
3/10/2010	11:54:57 PM	H2 valve closed
3/10/2010	11:54:57 PM	BCl3 valve closed
3/10/2010	11:54:57 PM	PH3 valve closed
3/10/2010	11:54:57 PM	SiCl4 pre valve closed
3/10/2010	11:54:57 PM	SiCl4 post valve closed
3/10/2010	11:54:57 PM	Main Vac valve closed
3/10/2010	11:54:57 PM	Bypass valve closed
3/10/2010	11:54:57 PM	Helium valve opened
3/10/2010	11:54:57 PM	Bubbler valve opened
3/10/2010	11:54:57 PM	Helium MFC set to  500.000000
3/10/2010	11:54:57 PM	H2 MFC set to  0.000000
3/10/2010	11:54:57 PM	BCl3 MFC set to  0.000000
3/10/2010	11:54:57 PM	SiCl4 MFC set to  0.000000
3/10/2010	11:54:57 PM	Bypass solenoid MFC set to  0.000000
3/10/2010	11:54:57 PM	Tube furnace set to 0
